An array of 32 sensor elements with single-walled carbon nanotubes (SWCNTs) as the sensing medium has been fabricated. The microfabrication approach used allows reduction of the chip size and increases the number of sensor elements in a chip and is amenable for large wafer scale-up. The sensor array chip is designed as an electronic nose for use with the aid of a pattern recognition algorithm. The sensor chips were tested for NO2 sensing and interfering effects from humidity and a background of chlorine. The results indicate that NO2 can be detected at low concentration levels of 0.5 ppm in the presence of chlorine at 30 times higher concentrations. The sensor response is affected by humidity, which implies that the training data set for NO2 detection needs to be generated for multiple humidity levels for interpolation purposes during field use.
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K.J. Albert, N.S. Lewis, C.L. Schauer, G.A. Sotzing, S.E. Stitzel, T.P. Vaid, and D.R. Walt: Cross-reactive chemical sensor arrays. Chem. Rev. 100, 2595 (2000).
J.R. Stetter and J. Li: Amperometric gas sensors—A review. Chem. Rev. 108, 352 (2008).
F. Rock, N. Barsan, and U. Weimar: Electronic nose: Current status and future trends. Chem. Rev. 108, 705 (2008).
P. Grundler: Chemical sensors: An introduction for scientists and engineers, (Springer, 2007).
J. Li: Carbon nanotube applications: Chemical and physical sensors, in Carbon Nanotubes: Science and Applications, edited by M. Meyyappan (CRC Press, Boca Raton, FL, 2004), chapter 9.
M. Meyyappan and M. Sunkara: Inorganic Nanowires: Applications, Properties and Characterization (CRC Press, Boca Raton, FL, 2010), chapter 14.
M. Cinke, J. Li, B. Chen, A. Cassell, L. Delzeit, J. Han, and M. Meyyappan: Pore structure of raw and purified HiPCo single-walled carbon nanotubes. Chem. Phys. Lett. 365, 69 (2002).
J. Kong, N.R. Franklin, C. Zhou, M.G. Chapline, S. Peng, K. Cho, and H. Dai: Nanotube molecular wires as sensors. Science 287, 662 (2000).
P. Qi, O. Vermesh, M. Grecu, A. Javey, Q. Wang, H. Dai, S. Peng, and K.J. Cho: Toward large arrays of multiplex functionalized carbon nanotube sensors for highly sensitive and selective molecular detection. Nano Lett. 3, 347 (2003).
H.T. Ng, A. Fang, J. Li, and S.F.Y Li: Flexible carbon nanotube membrane sensory system: A generic platform. J. Nanosci. Nanotechnol. 1, 375 (2001).
J. Li, Y. Lu, Q. Ye, M. Cinke, J. Han, and M. Meyyappan: Carbon nanotube sensors for gas and organic vapor detection. Nano Lett. 3, 929 (2003).
Y. Lu, J. Li, J. Han, H.T. Ng, C. Binder, C. Partridge, and M. Meyyappan: Room temperature methane detection using palladium loaded single-walled carbon nanotube sensors. Chem. Phys. Lett. 391, 344 (2004).
J. Li, Y. Lu, Q. Ye, L. Delzeit, and M. Meyyappan: A gas sensor array using carbon nanotubes and microfabrication technology. Electrochem. Solid-State Lett. 8, H100 (2005).
Y. Lu, C. Partridge, M. Meyyappan, and J. Li: A carbon nanotube sensor array for sensitive gas discrimination using principal component analysis. J. Electroanal. Chem. 593, 105 (2006).
J. Li, Y. Lu, and M. Meyyappan: Nanochemical sensors with polymer-coated carbon nanotubes. IEEE Sens. J. 6, 1047 (2006).
E. Bekyarova, M. Davis, T. Burch, M.E. Itkis, B. Zhao, S. Sunshine, and R.C. Haddon: Chemically functionalized single-walled carbon nanotubes as ammonia sensors. J. Phys. Chem. B 108, 19717 (2004).
A. Star, V. Joshi, S. Skarupo, D. Thomas, and J.P. Gabriel: Gas sensor array based on metal-decorated carbon nanotubes. J. Phys. Chem. B 110, 21014 (2006).
Y.W. Chang, J.S. Oh, S.H. Yoo, H.H. Choi, and K.H. Yoo: Electrically refreshable carbon-nanotube-based gas sensors. Nanotechnology 18, 435504 (2007).
T.S. Cho, K.J. Lee, J. Kong, and A.P. Chandrakasan: A 32-μw 1.83-kS/s carbon nanotube chemical sensor system. IEEE J. Solid-State Circuits 44, 659 (2009).
J.P. Novak, E.S. Snow, E.J. Houser, D. Park, J.L. Stepnowski, and R.A. McGill: Nerve agent detection using networks of single-walled carbon nanotubes. Appl. Phys. Lett. 83, 4026 (2003).
M. Penza, G. Cassano, R. Rossi, A. Rizzo, M.A. Signore, M. Alvisi, N. Lisi, E. Serra, and R. Giorgi: Effect of growth catalysts on gas sensitivity in carbon nanotube film based chemiresistive sensors. Appl. Phys. Lett. 90, 103101 (2007).
D.R. Kauffman and A. Star: Carbon nanotube gas and vapor sensors. Angew. Chem. Int. Ed. 47, 6550 (2008).
M.A. Ryan, H. Zhou, M.G. Buehler, K.S. Manatt, V.S. Mowrey, S.P. Jackson, A.K. Kisor, A.V. Shevade, and M.L. Homer: Monitoring space shuttle air quality using the jet propulsion laboratory electronic nose. IEEE Sens. J. 4, 337 (2004).
Y. Lu, M. Meyyappan, and J. Li: A carbon-nanotube-based sensor array for formaldehyde detection. Nanotechnology 22, 055502 (2011).
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Lu, Y., Meyyappan, M. & Li, J. Fabrication of carbon-nanotube-based sensor array and interference study. Journal of Materials Research 26, 2017–2023 (2011). https://doi.org/10.1557/jmr.2011.225