Optical Reflectance and Rheed Transients During Mbe Growth on (001) GaAs

Abstract

We compare the dynamic responses of reflection high energy electron diffraction (RHEED) and optical reflectance-difference (RD) signals caused by abrupt changes in incident fluences of Ga and As during MBE growth of GaAs on (001) GaAs. Our results reveal that RHEED and RD originate mainly, although not completely, from structural order and chemical bonding, respectively, and thus provide complementary information for real-time studies of MBE growth. We also measure the wavelength dependence of the RD spectrum and show that it can be described approximately from 2 to 4 eV by a single Lorentzian absorption line centered at 2.4 eV.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    J. R. Arthur and J. J. LePore, J. Vac. Sci. Technol. 6, 545 (1969).

    CAS  Article  Google Scholar 

  2. 2.

    A. Y. Cho, Surface Sci. 17, 494 (1969).

    Article  Google Scholar 

  3. 3.

    J. H. Neave, B. A. Joyce, P. J. Dobson, and N. Norton, Appl. Phys. A31, 1 (1983).

    CAS  Article  Google Scholar 

  4. 4.

    J. M. Van Hove, P. I. Cohen, and C. S. Lent, J. Vac. Sci. Technol. A1, 546 (1983).

    Article  Google Scholar 

  5. 5.

    T. Sakamoto, H. Funabashi, K. Ohta, T. Nakagawa, N. J. Kawai, T. Kojima, and Y. Bando, Superlatt. and Microstruc. 1, 347 (1985).

    CAS  Article  Google Scholar 

  6. 6.

    A. Madhukar, T. C. Lee, M. Y. Yen, P. Chen, J. Y. Kim, S. V. Ghaisas, and P. G. Newman, Appl. Phys. Lett. 46, 1148 (1985).

    CAS  Article  Google Scholar 

  7. 7.

    P. Chen, A. Madhukar, J. Y. Kim, and T. C. Lee, Appl. Phys. Lett. 48, 650 (1986).

    CAS  Article  Google Scholar 

  8. 8.

    B. F. Lewis, F. J. Grunthaner, A. Madhukar, T. C. Lee, and R. Fernandez, J. Vac. Sci. Technol. B3, 1317 (1985).

    Article  Google Scholar 

  9. 9.

    J. M. Van Hove, P. R. Pukite, and P. I. Cohen, J. Vac. Sci. Technol. B3563 (1985).

  10. 10.

    D. E. Aspnes and A. A. Studna, Phys. Rev. Lett. 54, 1956 (1985).

    CAS  Article  Google Scholar 

  11. 11.

    D. E. Aspnes, J. Vac. Sci. Technol. B3, 1498 (1985).

    Article  Google Scholar 

  12. 12.

    D. E. Aspnes and A. A. Studna, Phys. Rev. B27, 985 (1983).

    Article  Google Scholar 

  13. 13.

    D. E. Aspnes and A. A. Studna, Rev. Sci. Instrum. 49, 291 (1978).

    CAS  Article  Google Scholar 

  14. 14.

    L. Vina and M. Cardona, Phys. Rev. B30, 1979 (1984).

    Article  Google Scholar 

  15. 15.

    H. H. Farrell, J. Vac. Sci. Technol. (in press.)

  16. 16.

    P. K. Larsen, J. F. van der Veen, A. Mazur, J. Pollmann, J. H. Neave, and B. A. Joyce, Phys. Rev. B26, 3222 (1982).

    Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to D. E. Aspnes.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Aspnes, D.E., Harbison, J.P., Studna, A.A. et al. Optical Reflectance and Rheed Transients During Mbe Growth on (001) GaAs. MRS Online Proceedings Library 91, 57–62 (1987). https://doi.org/10.1557/PROC-91-57

Download citation