Effective Direct Piezoelectric Constants in Epitaxial Ferroelectric Films as MEMS Sensors

Abstract

Following our previous work on the converse piezoelectric constant- d C33,f in epitaxial ferroelectric films for MEMS actuator applications, the orientation dependence of the direct piezoelectric constants d D33,f , d D31,f and e D31,f are generally formulated, which can help to predict and optimize the performance of piezoelectric MEMS sensor devices based on ferroelectric thin films. Numerical results are obtained and discussed for Pb(ZrxTi1-x)O3 thin films grow on Si substrates with various compositions and structures.

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Ouyang, J., Ramesh, R. & Roytburd, A.L. Effective Direct Piezoelectric Constants in Epitaxial Ferroelectric Films as MEMS Sensors. MRS Online Proceedings Library 881, 57 (2005). https://doi.org/10.1557/PROC-881-CC5.7

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