This paper presents the results of nanoindentation experimental studies of Au thin films with different thicknesses. The effects of film thickness and microstructure on the hardnesses of electron-beam deposited Au films were studied in terms of Hall-Petch relationship. The effects of different thicknesses on indentation size effects (ISE) are explained within the framework of mechanism-based strain gradient (MSG) theory using the concept of microstructural length scale.
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Cao, Y., Zong, Z. & Soboyejo, W. An Investigation of Film Thickness Effect on Mechanical Properties of Au Films Using Nanoindentation Techniques. MRS Online Proceedings Library 875, 56 (2005). https://doi.org/10.1557/PROC-875-O5.6