An Investigation of Film Thickness Effect on Mechanical Properties of Au Films Using Nanoindentation Techniques

Abstract

This paper presents the results of nanoindentation experimental studies of Au thin films with different thicknesses. The effects of film thickness and microstructure on the hardnesses of electron-beam deposited Au films were studied in terms of Hall-Petch relationship. The effects of different thicknesses on indentation size effects (ISE) are explained within the framework of mechanism-based strain gradient (MSG) theory using the concept of microstructural length scale.

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Correspondence to Yifang Cao.

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Cao, Y., Zong, Z. & Soboyejo, W. An Investigation of Film Thickness Effect on Mechanical Properties of Au Films Using Nanoindentation Techniques. MRS Online Proceedings Library 875, 56 (2005). https://doi.org/10.1557/PROC-875-O5.6

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