Abstract
We present a new conceptual active optical microphone based on complementary metal-oxide semiconductor (CMOS) - micro electro mechanical systems (MEMS) micromachining techniques. The diaphragm of the microphone has a diffracting grating fabricated by the CMOS process with only a small number of post-processes. The active microphone actuates the diaphragm on an arbitrary frequency by electrostatic force, and detects sound waves by the light waves. From the verification experiment result, this active microphone was able to perform advanced functions, such as the amplifier effect and the detection of phase information of sound waves.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
M. Hirayama, K. Nakamura and S. Ueha: Tech. Dig. Spring Meeting of the Acoustical Society of Japan, 1-8-3, Tokyo, 2003 [in Japanese].
T. Takizawa, N. Saito and Y. Yamasaki: Tech. Dig. Spring Meeting of the Acoustical Society of Japan, 1-8-2, Tokyo, 2003 [in Japanese].
Y. Suzuki and K. Kido: Acoust. Sci. Technol. 25 (2004) 45.
S. H Mei, Y. Zhou, Y. L Lam and F. Ruan: Lasers and Electro-Optics, 1999 (CLEO ’99. Summaries of Papers Presented at the Conference) p. 432.
J. Deng, H. Xiao, W. Huo, M. Luo, R. May, A. Wang, and Y. Liu: Opt. Technol. 33 (2001) 305.
K. Suzuki, H. Funaki and Y. Naruse: Jpn. J. Appl. Phys. 44 (2005), to be published.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Suzuki, K., Funaki, H. & Naruse, Y. An Optical Diffraction Microphone with Active Grating Diaphragm. MRS Online Proceedings Library 872, 1311 (2005). https://doi.org/10.1557/PROC-872-J13.11
Published:
DOI: https://doi.org/10.1557/PROC-872-J13.11