A new organic precursor was designed and synthesized in order to form polymer films having low dielectric constants by a plasma-enhanced co-polymerization (PCP) technology. The organic monomer features a large aliphatic hydrocarbon structure, tricyclodecane (TCD) group. Optimized polymer films deposited from the monomer had dielectric constants less than 2.5. A solid 13C-NMR spectrum showed that the TCD moiety in the precursor was included in the polymer without changing the structure. The effect of the deposition temperature on the film structure was studied by analyzing Raman spectra. It was revealed that the dielectric constant is strongly associated with sp2 carbon content in the TCD-based polymer films.
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
D. D. Burkey and K. K. Gleason, J. Vac. Sci. Technol. A 22(1), 61 (2004)
N. Fujii, K. Yamada, Y. Oku, N. Hata, Y. Seino, C. Negoro and T. Kikkawa, Mat. Res. Soc. Symp. Proc. 812, 43 (2004)
T. Kikkawa, Ext. Abst. ADMETA 2003: Assian session, 1–2, 4 (2003)
J. Kawahara, A. Nakano, N. Kunimi, K. Kinoshita, Y. Hayashi, A. Ishikawa, Y. Seino, T. Ogata, H. Takahashi, Y. Sonoda, T. Yoshino, T. Goto, S. Takada, R. Ichikawa, H. Miyoshi, H. Matsuo, S. Adachi and T. Kikkawa, Technical Dig. IEDM 2003, 6–2, 143 (2003)
K. Kinoshita, Proc. Plasma Science Symp. 2005 / 22nd Symp. Plasma Processing, 485, (2005)
T. W. Greene and P. G. M. Wuts, Protective Groups in Organic Synthesis 3rd. Ed., John Wiley & Sons, Inc., 116 (1999)
K. Kinoshita, A. Nakano, N. Kunimi, M. Shimoyama, J. Kawahara, H. Miyoshi, Y. Seino, Y. Takasu, R. Ichikawa, M. Komatsu, Y. Hayashi and T. Kikkawa, Proc. AMC 2004, P. 14, (2004)
J. Y. Kim, M. S. Hwang, Y-H. Kim, H. J. Kim and Y Lee, J. Appl. Phys. 90(5), 2469 (2001)
About this article
Cite this article
Kunimi, N., Kawahara, J., Kinoshita, K. et al. A Novel Organic Low-k Film Deposited by Plasma-Enhanced Co-Polymerization. MRS Online Proceedings Library 863, B8.1 (2004). https://doi.org/10.1557/PROC-863-B8.1