Metal Induced Growth of Poly-Si Solar Cells and Silicide Nanowires by use of Multiple Catalyst Layers


Polycrystalline Si thin films and single NiSi crystalline nanowires were made by the metal induced growth method. The different growth mechanisms for poly-Si and nanowires lie in the metal silicide formation. Poly-Si growth is based on metal disilicide formation and the growth of nanowires depends on metal monosilicide formation. The metal silicide formation depends on catalyst species and sputtering power. Following catalyst coating, Si was deposited in a DC magnetron sputtering system to grow poly-Si or nanowires. Several metals (Ni, Co, Co/Ni and Pd) were used as catalysts to confirm the nanowire growth mechanism as well as to fabricate solar cells. Poly-Si thin films were about 5 μm thick with up to 1μm crystallite size. Nanowires were up to 10 μm long with about 50 nm diameter.

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  1. [1]

    E.A. Guliants, W.A. Anderson, L.P. Guo, V.V. Guliants, Thin Solid Films, 385 (2001), 74

    CAS  Article  Google Scholar 

  2. [2]

    Chunhai Ji and Wayne A. Anderson, IEEE Electron Devices, 50 (2003), 1885

    CAS  Article  Google Scholar 

  3. [3]

    J. P. Gambino, E. G. Colgan, Mater. Chem. Phys. 52 (1998) 99.

    CAS  Article  Google Scholar 

  4. [4]

    Joondong Kim and Wayne A. Anderson, Thin Solid Films (In press)

  5. [5]

    Joondong Kim, Wayne A. Anderson, Elena A. Guliants and Christopher E. Bunker, Morphological Changes while Growing Nickel Monosilicide Nanowires, Boston, U.S.A. Nov. 28–Dec. 2, 2004, Materials Research Society Symposium Proceeding 854E (2004) U 5. 10.

  6. [6]

    Chunhai Ji, Joondong Kim and Wayne A. Anderson, Study of Photovoltaic Properties and Light Absorption in Poly-Si Thin Film Solar Cell Grown by the Metal-Induced Method, Denver, U.S.A. August 4–6, 2004, SPIE-The International Society for Optical Engineering 5520–39 (2004), 184-191

    Google Scholar 

  7. [7]

    Amal K. Ghosh, Charles Fishman and Tom Feng, J. Appl. Phys., 51 (1980), 446

    CAS  Article  Google Scholar 

Download references


This work was partially funded by the National Science Foundation, ECS-0324893.

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Correspondence to Joondong Kim.

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Kim, J., Ji, C. & Anderson, W.A. Metal Induced Growth of Poly-Si Solar Cells and Silicide Nanowires by use of Multiple Catalyst Layers. MRS Online Proceedings Library 862, 215 (2004).

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