Investigation of Femtosecond Laser Irradiation on Fused Silica Etching Selectivity


Femtosecond laser irradiation has various noticeable effects on fused silica. It can locally increase the index of refraction or modify the material chemical selectivity. Regions that have been exposed to the laser are etched several times faster than unexposed regions. Various observations reported in the literature seem to show that these effects are possibly related to a combination of structural changes and the presence of internal stress. However, a detailed analysis of the contribution of both effects is still lacking.

In this paper, we present systematic SEM-based investigations performed on fused silica (a-SiO2). Line-patterns were first scanned on the substrate using a femtosecond laser and then etched in a low-concentration HF solution. The effects of various laser parameters like power and scanning speed are analyzed and we show further evidence of an interface between two different etching regimes.


  1. 1.

    Y. Kondo, T. Suzuki, H. Inouye, K. Miura, T. Mitsuyu, K. Hirao, Jpn. J. Appl. Phys. 37, L94–L96 (1998).

    CAS  Article  Google Scholar 

  2. 2.

    A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, J. Nishii, Optics Letters 26, 277–279 (2001).

    CAS  Article  Google Scholar 

  3. 3.

    K. M. Davis, K. Miura, N. Sugimoto, K. Hirao, Optics Letters 21, 1729 (1996),.

    CAS  Article  Google Scholar 

  4. 4.

    A. Agarwal, M. Tomozawa, J. Non. Cryst. Solids 209, 166–174 (1997).

    CAS  Article  Google Scholar 

  5. 5.

    Y. Bellouard, A. Said, M. Dugan, P. Bado, Optics Express 12, 2120–2129 (2004).

    CAS  Article  Google Scholar 

  6. 6.

    P. Bado, A. Said, M. Dugan, T. Sosnowski, S. Wright, NFOEC, Dallas, Sept. 2002.

    Google Scholar 

  7. 7.

    K. Awazu, H. Kawazoe, J. Appl. Physics 94, 6243–6262 (2003).

    CAS  Article  Google Scholar 

  8. 8.

    C. Fiori, R.A.B. Devine, Phys. Rev. B 33, 2972–2974 (1986).

    CAS  Article  Google Scholar 

  9. 9.

    F. L. Galeener, Solid State Commun. 44, 1037–1040 (1982).

    CAS  Article  Google Scholar 

  10. 10.

    Y. Ikuta, K. Kajihara, M. Hirano, H. Hosono, Appl. Opt. 43, 2332–2336 (2004)

    CAS  Article  Google Scholar 

  11. 11.

    X.R. Zhang, X. Xu, A.M. Rubenchik, Appl. Phys. A 79, 945–948 (2004)

    CAS  Article  Google Scholar 

  12. 12.

    K. Awazu, J. Non. Cryst. Solids 337, 241–253 (2004).

    CAS  Article  Google Scholar 

  13. 13.

    V.R. Bardwaj, P.B. Corkum, D.M. Rayner, C. Hnatovky, E. Simova, R.S. Taylor, Optics Letters 29, 1312–1314 (2004).

    Article  Google Scholar 

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Correspondence to Yves Bellouard.

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Bellouard, Y., Said, A.A., Dugan, M. et al. Investigation of Femtosecond Laser Irradiation on Fused Silica Etching Selectivity. MRS Online Proceedings Library 850, 158–163 (2004).

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