Three-Dimensional Micro- and Nanofabrication with Multiphoton Absorption

Abstract

Multiphoton absorption has become a powerful technique for the creation of three-dimensional micro- and nanostructures. Here we review some of our recent progress towards creating functional microdevices with multiphoton absorption. Specific thrusts of our research include development of new resins for multiphoton absorption polymerization, design of novel schemes for metal deposition, and post-fabrication ablation of polymeric structures.

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References

  1. 1.

    W. Denk, J. H. Strickler, and W. Webb, Science 248, 73 (1990).

    CAS  Article  Google Scholar 

  2. 2.

    S. Maruo, O. Nakamura, and S. Kawata, Opt. Lett. 22 (2), 132 (1997).

    CAS  Article  Google Scholar 

  3. 3.

    S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, Nature 412 (6848), 697 (2001).

    CAS  Article  Google Scholar 

  4. 4.

    G. Witzgall, R. Vrijen, E. Yablonovitch, V. Doan, and B. J. Schwartz, Opt. Lett. 23 (22), 1745 (1998).

    CAS  Article  Google Scholar 

  5. 5.

    B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, Nature 398, 51 (1999).

    CAS  Article  Google Scholar 

  6. 6.

    P. J. Campagnola, D. M. Delguidice, G. A. Epling, K. D. Hoffacker, A. R. Howell, J. D. Pitts, and S. L. Goodman, Macromol. 33 (5), 1511 (2000).

    CAS  Article  Google Scholar 

  7. 7.

    K. D. Belfield, X. Ren, E. W. Van Stryland, D. J. Hagan, V. Dubikovsky, and E. J. Miesak, J. Amer. Chem. Soc. 122 (6), 1217 (2000).

    CAS  Article  Google Scholar 

  8. 8.

    T. Baldacchini, C. LaFratta, R. A. Farrer, M. C. Teich, B. E. A. Saleh, M. J. Naughton, and J. T. Fourkas, J. Appl. Phys. 95 (11), 6072 (2004).

    CAS  Article  Google Scholar 

  9. 9.

    F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. D. Zhang, S. R. Marder, and J. W. Perry, Adv. Mater. 14 (3), 194 (2002).

    CAS  Article  Google Scholar 

  10. 10.

    P.-W. Wu, W. Cheng, I. B. Martini, B. Dunn, B. J. Schwartz, and E. Yablonovitch, Adv. Mater. 12 (19), 1438 (2000).

    CAS  Article  Google Scholar 

  11. 11.

    K. Kaneko, H. B. Sun, X. M. Duan, and S. Kawata, Appl. Phys. Lett. 83 (7), 1426 (2003).

    CAS  Article  Google Scholar 

  12. 12.

    P. C. Hidber, P. F. Nealey, W. Helbig, and G. M. Whitesides, Langmuir 12 (21), 5209 (1996).

    CAS  Article  Google Scholar 

  13. 13.

    S. Georgiou and F. Hillenkamp, Chem. Rev. 103 (2), 317 (2003).

    CAS  Article  Google Scholar 

Download references

Acknowledgments

This work was supported by the National Science Foundation, Grants ECS-0088438 (JTF) and NIRT-0210533 (MJN). JTF is a Research Corporation Cottrell Scholar and a Camille Dreyfus Teacher-Scholar.

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Correspondence to Christopher N. LaFratta.

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LaFratta, C.N., Farrer, R.A., Baldacchini, T. et al. Three-Dimensional Micro- and Nanofabrication with Multiphoton Absorption. MRS Online Proceedings Library 850, 19–24 (2004). https://doi.org/10.1557/PROC-850-MM4.5

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