Fabrication of Anatase TiO2 Thin Film Using Pulsed DC Magnetron Sputtering

Abstract

TiO2 thin films (500–1000 nm in thickness) were deposited using pulsed DC magnetron reactive sputtering, on glass substrates. The depositions used a Ti source in an Ar+O2 gas mixture with different parameters of power (350 - 500W), substrate temperature (no additional heat - 400°C), growth pressure (3.0 - 5.0 mTorr) and oxygen gas flow rate (6.0 - 8.0 sccm). The x-ray diffractions (XRD) show amorphous and/or anatase phases depending on the deposition conditions. The films were found to be amorphous at lower substrate temperature and at lower powers. The sample with 4 mTorr, 400W of power, a substrate temperature of 250 C with 7.0 sccm of oxygen flow has the best crystalline quality. The temperature dependent electrical conductivity measurement in air for the above films shows an exponential increase in conductivity with temperature.

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References

  1. [1]

    D. Mergel, D. Buschendorf, S. Eggert, R. Grammes, B. Samset, Thin Solid Films 371 (2000) 218.

    CAS  Article  Google Scholar 

  2. [2]

    K.D. Rogers, D.W. Lane, J.D. Painter, A. Chapman, Thin Solid Films 466 (2004) 97.

    CAS  Article  Google Scholar 

  3. [3]

    Peng Jun, Liu Duren, Sensors and Actuators B 66 (2000) 210.

    CAS  Article  Google Scholar 

  4. [4]

    Marta Radecka, Katarzyna Zakrzewska, Mieczyslaw Rekas, Sensors and Actuators B 47 (1998) 194.

    CAS  Article  Google Scholar 

  5. [5]

    M. Ferroni, V. Guidi, G. Martinelli, G. Faglia, P. Nelli, G. Sberveglieri, NanoStructured Materials, Vol. 7. No. 7 (1996) 709.

    CAS  Article  Google Scholar 

  6. [6]

    H. Tang, K. Prasad, R. Sanjines, F. Levy, Sensors and actuators B 26-27 (1995) 71.

    Article  Google Scholar 

  7. [7]

    M.C. Carotta, M. Ferroni, D. Gnani, V. Guidi, M. Merli, G. Martinelli, M.C. Casale, M. Notaro, Sensors and Actuators B 58 (1999) 310.

    CAS  Article  Google Scholar 

  8. [8]

    L. Miao, P. Jin, K. Kaneko, A. Terai, N. Nabatova-Gabain, S. Tanemura, Applied Surface Science, 212 (2003) 255.

    Article  Google Scholar 

  9. [9]

    T. Sekiya, S. Ohta, S. Kamei, M. Hanakawa, S. Kurita, Journal of Physics and Chemistry of Solids, 62 (2001) 717.

    CAS  Article  Google Scholar 

  10. [10]

    Jean M. Bennett, Emile Pelletier, G. Albrand, J. P. Borgogno, B. Lazarides, Charles K. Carniglia, R. A. Schmell, Thomas H. Allen, Trudy Tuttle-Hart, Karl H. Guenther, and Andreas Saxer, Applied Optics vol. 28, No. 15, 1989.

    Google Scholar 

  11. [11]

    Shunjiro Ikezawa, Futoshi Mutsuga, Takanori Kubota, Ren Suzuki, Kiyohide Baba, Shinken Koh, Toshitaro Yoshioka, Akira Nishiwaki, Keisuke Kida, Yoshihiko Ninomiya, Koichi Wakita, Vacuum 59 (2000) 514.

    CAS  Article  Google Scholar 

  12. [12]

    H. Yamashita, M. Harada, J. Misaka, H. Nakao, M. Takeuchi, M. Anpo, Nuclear Instruments and Methods in Physics Research B 206 (2003) 889.

    CAS  Article  Google Scholar 

  13. [13]

    JCPDS, International Center for Diffraction Data, 1995-2000, USA.

    Google Scholar 

  14. [14]

    B. D. Cullity, Elements of x-ray diffraction, second edition, Addison-wesley, USA 1978.

    Google Scholar 

  15. [15]

    Bernd Huber, Hubert Gnaser, Christiane Ziegler, Surface Science 566 (2004) 419.

    Article  Google Scholar 

  16. [16]

    Bernd Huber, Alexander Brodyanski, Michael Scheib, Adam Orendorz, Christiane Ziegler, Hubert Gnaser, Thin Solid Films (2004) article in press.

    Google Scholar 

  17. [17]

    T.H. Dittrich, J. Weidmann, V. Yu. Timoshenko, A.A. Petrov, F. Koch, M.G. Lisachenko, E. Lebedev, Materials Science and Engineering B 69 (2000) 489.

    Article  Google Scholar 

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Correspondence to Ibrahim A. Al-Homoudi.

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Al-Homoudi, I.A., Zhang, L., McCullen, E.F. et al. Fabrication of Anatase TiO2 Thin Film Using Pulsed DC Magnetron Sputtering. MRS Online Proceedings Library 848, 187–192 (2004). https://doi.org/10.1557/PROC-848-FF3.20

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