Strength, friction, and wear are dominant factors in the performance and reliability of materials and devices fabricated using nickel based LIGA and silicon based MEMS technologies. However, the effects of frictional contacts and wear on the mechanical performance of microdevices are not well-defined. To address these effects on performance of LIGA nickel, we have begun a program employing nanoscratch and nanoindentation. Nanoscratch techniques were used to generate wear patterns using loads of 100, 200, 500, and 990 μN with each load applied for 1, 2, 5, and 10 passes. Nanoindentation was then used to measure properties in each wear pattern correcting for surface roughness. The results showed a systematic increase in hardness with applied load and number of nanoscratch passes. The results also showed that the work hardening coefficient determined from indentation tests within wear patterns follows the work hardening behavior established from tensile tests, supporting use of a nanomechanics-based approach for studying mechanical properties of wear tested material.
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The authors gratefully acknowledge the support of Sandia National Laboratories. Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company for the United States Department of Energy's National Nuclear Security Administration under contract DE-AC04-94AL85000.
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Moody, N.R., Jungk, J.M., Kennedy, M.S. et al. Mechanical Properties of Wear Tested LIGA Nickel. MRS Online Proceedings Library 841, R7.8 (2004). https://doi.org/10.1557/PROC-841-R7.8