The aim of this paper is to investigate the deformation behaviour of an AlN/CrN multilayer with wavelengths varying from 6–400 nm, deposited on M42 tool steel and how this varies as the temperature is increased to 500 °C. These measurements have been correlated with changes in deformation patterns using cross-sectional transmission electron microscopy, where sections have been prepared directly through the indents.
W.D. Sproul. Surf. Coat. Tech. 86–87, 170 (1996)
M. Shinn and S.A. Barnett. Appl. Phys. Lett. 64(1), 61 (1994)
P.M. Anderson, T. Foecke and P.M. Hazzledine. MRS Bull. 24(2), 27 (1999)
W.J. Clegg, F. Giuliani, Y. Long, S.J. Lloyd, ‘Hardening in multilayer ceramics’, in Ceramic Matrix Composites: Microstructure/Property Relationship, edited by I. M. Low, Woodhead Publishing, Cambridge, (in press 2005)
D P Monaghan et al. Surf. Coat. Tech, 59, 21 (1993)
W.C. Oliver and G.M. Pharr. J. Mater. Res. 7, 1564 (1992)
R.M. Langford and A.K. Pettford-Long. J. Vac. Sci. Techn. A, 19 (5), 2186 (2001)
X. Ji, S. Lau, G. Yu, W. Zhong, Y. Wang and B Tay. J. Phys. D, 36, 2543–2547 (2003)
A. Lousa, et al. Surf. Coat. Tech., 146–147, 146 (2001)
C. Kral, W. Lengauer, D. Rafaja and P. Ettmayer, J. Alloy. Comp. 265, 215–233 (1998)
Yonenaga. MRS Internet. J. Nitride Semicond. Res. Soc, Vol. 7 (6) (2002)
The Department of Trade and Industry, UK.
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Giuliani, F., Goruppa, A., Lloyd, S. et al. High Temperature Deformation of AlN/CrN Multilayers using Nanoindentation. MRS Online Proceedings Library 841, R4.9 (2004). https://doi.org/10.1557/PROC-841-R4.9