High Temperature Deformation of AlN/CrN Multilayers using Nanoindentation


The aim of this paper is to investigate the deformation behaviour of an AlN/CrN multilayer with wavelengths varying from 6–400 nm, deposited on M42 tool steel and how this varies as the temperature is increased to 500 °C. These measurements have been correlated with changes in deformation patterns using cross-sectional transmission electron microscopy, where sections have been prepared directly through the indents.


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Giuliani, F., Goruppa, A., Lloyd, S. et al. High Temperature Deformation of AlN/CrN Multilayers using Nanoindentation. MRS Online Proceedings Library 841, R4.9 (2004). https://doi.org/10.1557/PROC-841-R4.9

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