Poly(ethylene terephthalate), or PET, has been widely used in experiments due to its excellent properties and availability in sheets as thin as 1.5 µm. Its resistance to chemical attack makes PET a good choice as an inert substrate, but makes liquid phase deposition of thin films from solution challenging. Further, attempts to deposit films from the vapor phase have shown limited success. High quality PET films are desirable, as PET is transparent, hydrophobic, amenable to micropatterning, and is well characterized. As such, PET films are suited for use in microdevices. We report on liquid phase deposition of PET films, and on characterization of the films using optical methods.
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This research work is supported by the Natural Sciences and Engineering Research Council (NSERC). RMB is supported through an industrial NSERC scholarship administered jointly by Micralyne Inc. and NSERC. The authors would like to thank George Braybrook for taking SEM images. RMB would like to thank James Gospodyn for VASE training.
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Bryce, R.M., Nguyen, H.T., Tykwinski, R.R. et al. Liquid Phase Deposition of Poly(ethylene terephthalate) Films. MRS Online Proceedings Library 820, 152–157 (2004). https://doi.org/10.1557/PROC-820-O6.6