Self-supporting polymer foils of several micrometer thickness have been structured using irradiation by fast heavy ions and subsequent etching. Very deep, well defined nanostructures can be prepared in this way. These can then be used as templates for semiconductor deposition and the fabrication of robust embedded electronic devices. Electron microscopy shows voidfilling poly-crystalline growth in the polymer films. Electrical experiments show low sensitivity when mechanical forces are exerted on the foil, suggesting that the embedded nanodevices can be used as reliable sensors in applications with considerable bending of the foils. Two different transistor arrangements will be discussed.
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We gratefully acknowledge fruitful discussions and support of the project by Prof. M.C. Lux-Steiner.
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Könenkamp, R., Chen, J., Klaumuenzer, S. et al. Nano-Scale Devices Embedded in Self-Supporting Polymer Foils. MRS Online Proceedings Library 814, 272–277 (2004). https://doi.org/10.1557/PROC-814-I7.4