Nano-Scale Devices Embedded in Self-Supporting Polymer Foils


Self-supporting polymer foils of several micrometer thickness have been structured using irradiation by fast heavy ions and subsequent etching. Very deep, well defined nanostructures can be prepared in this way. These can then be used as templates for semiconductor deposition and the fabrication of robust embedded electronic devices. Electron microscopy shows voidfilling poly-crystalline growth in the polymer films. Electrical experiments show low sensitivity when mechanical forces are exerted on the foil, suggesting that the embedded nanodevices can be used as reliable sensors in applications with considerable bending of the foils. Two different transistor arrangements will be discussed.

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  1. 1.

    J. C. Hulteen, C. R. Martin, J. Mater. Chem. 7, 1075 (1997).

    CAS  Article  Google Scholar 

  2. 2.

    D. Dobrev, J. Vetter, and N. Angert, Nucl. Instrum. Methods Phys. Res. B 149, 207 (1999).

    CAS  Article  Google Scholar 

  3. 3.

    R. Engelhardt and R. Könenkamp, J. Appl. Phys. 90, 4287 (2001)

    CAS  Article  Google Scholar 

  4. 4.

    P.Yu. Apel and G. Pretsch, Nucl. Tracks Readiat. Meas., 11, 45 (1986).

    CAS  Article  Google Scholar 

  5. 5.

    T. Steckenreiter, E. Balanzat, H. Fuess, and C. Trautmann, J. Polym. Sci. A, Polym. Chem. 37, 4318 (1999).

    CAS  Article  Google Scholar 

  6. 6.

    C. Rost, diploma thesis, Physics Department, Freie Universität Berlin, 1999.

  7. 7.

    J. Chen and R. Könenkamp, Appl. Phys. Lett. 82, 4782 (2003)

    CAS  Article  Google Scholar 

  8. 8.

    Cepak, V. M. and Martin, C. R., Chem. Mater. 11, 1363 (1999)

    CAS  Article  Google Scholar 

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We gratefully acknowledge fruitful discussions and support of the project by Prof. M.C. Lux-Steiner.

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Correspondence to R. Könenkamp.

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Könenkamp, R., Chen, J., Klaumuenzer, S. et al. Nano-Scale Devices Embedded in Self-Supporting Polymer Foils. MRS Online Proceedings Library 814, 272–277 (2004).

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