Fin Sidewall Microroughness Measurement by AFM

Abstract

The sidewalls of etched Si lines will be the carrier channel surfaces in FinFET devices. These surfaces must be as smooth as possible for optimal device performance. Thus, the ability to quantitatively measure sidewall roughness is essential to process development. A methodology to quantitatively measure Fin sidewall roughness by AFM is presented. The samples were prepared for measurement by cleaving along the length of the Fins or dense-line test structures and by FIB polishing to bring the edge of the sample close to the sidewall of the etched feature. The cleaved and FIB-polished sample was mounted 17 degrees shy of normal. This exposes the sidewall on the top surface while preventing shadowing of the lower part of the sidewall due to contact between the side of the probe support and the cleaved or polished edge. Quantitative AFM measurements taken by this method show meaningful differences in the sidewall roughness for samples that have seen different sidewall smoothing treatments. The average observed rms roughness values for various surface-smoothing treatments range from 0.8 to 1.8 Å for a 50 nm square area.

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References

  1. 1

    X. Huang, W.C. Lee, C. Kuo, D. Hisamoto, L. Chang, J. Kedzierski, E. Anderson, H. Takeuchi, Y.K. Choi, K. Asano, V. Subramanian, T.J. King, J. Bokor, C. Hu, Technical Digest of IEDM, 67–70 (1999)

  2. 2

    X. Baie, J.P. Colinge, V. Bayot and E. Grivei, Proceedings of the IEEE International SOI Conference, 66–67 (1995)

  3. 3

    B.S. Doyle, S. Datta, M. Doczy, S. Hareland, B. Jin, J. Kavalieros, T. Linton, A. Murthy, R. Rios, R. Chau, IEEE Electron Device Letters, 24(4), 263–265 (2003)

    CAS  Article  Google Scholar 

  4. 4

    J.T. Park, J.P. Colinge and C. H. Diaz, IEEE Electron Device Letters, 22(8) 405–406 (2001)

    Article  Google Scholar 

  5. 5

    F.L. Yang, H.Y. Chen, F.C. Cheng, C.C. Huang, C.Y. Chang, H.K. Chiu, C.C. Lee, C.C. Chen H.T. Huang, C.J. Chen, H.J. Tao, Y.C. Yeo, M.S. Liang, and C. Hu, Technical Digest of IEDM, 255–258 (2002)

  6. 6

    Z. Krivokapic, C. Tabery, W. Maszara, Q. Xiang, M.R. Lin, Extended Abstracts of the International Conference on Solid State Devices and Materials, SSDM, pp. 760–762, 2003

    Google Scholar 

  7. 7

    Jeong-Soo Lee, Yang-Kyu Choi, Daewon Ha, S. Balasubramanian, Tsu-Jae King, J. Bokor, IEEE Electron Device Letters, 24(3), 186–188 (2003)

    CAS  Article  Google Scholar 

  8. 8

    Yang-Kyu Choi, Leland Chang, P. Ranade, Jeong-Soo Lee, Daewon Ha, S. Balasubramanian, A. Agarwal, M. Ameen, Tsu-Jae King, J. Bokor, Technical Digest of the International Electron Devices Meeting, 259–262 (2002)

  9. 9

    H. Kuribayashi, R. Hiruta, R. Shimizu, K. Sudoh, H. Iwasaki, J. Vac, Sci. Technol. A 21(4) 1279 (2003)

    CAS  Google Scholar 

  10. 10

    J. R. Kingsley, R. J. Plano. K.-J. Chao, in Metrology, Inspection and Process control for Microlithography XII; edited by Bhanwar Singh, (Proc. SPIE 3332 1998) p. 508

    Article  Google Scholar 

  11. 11

    Yves Martin, H. Kumar Wickramasinghe, Appl. Phys. Lett. 64(19) 2498–2500 (1994)

    CAS  Article  Google Scholar 

  12. 12

    Angela Guerry, Carolyn F. H. Gondran, Kirk Miller, to be published in the proceedings of the 15th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (2004)

  13. 13

    2003 International Technology Roadmap for Semiconductors, Front End Processes, Surface Prep, footnote J, p. 20

  14. 14

    Carolyn F. H. Gondran, Diane K. Michelson to be presented at and published in the proceedings of the ISTFA04

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Correspondence to Carolyn F. H. Gondran.

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Gondran, C.F.H., Morales, E., Guerry, A. et al. Fin Sidewall Microroughness Measurement by AFM. MRS Online Proceedings Library 811, 43–48 (2003). https://doi.org/10.1557/PROC-811-E1.13

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