Suppression of Ni Silicide Formation by Se Passivation of Si(001)

Abstract

Valence mending of a semiconductor surface, such as the Se-passivated Si(001) surface, improves the chemical and thermal stability of the surface as compared to the bare Si(001) surface. In this paper, we report the suppression of Ni silicide formation between Ni and Si(001) through monolayer passivation of Si(001) by Se. Ni was deposited on both Se-passivated and bare Si(001) surfaces. The samples were annealed at temperatures from 400°C to 700°C. Cross-sectional TEM (Transmission Electron Microscopy) revealed that Ni on bare samples reacted with Si at 400°C and formed silicide, whereas Ni on Se-passivated samples did not react with Si at 500°C. Surface composition analysis by XPS (X-Ray Photoelectron Spectroscopy) showed pure Ni surface on Se-passivated samples annealed at 400°C and 500°C, but silicide surface on bare samples annealed at the same temperatures. Hence, Se passivation suppresses the formation of Ni silicide on the Si(001) surface by over 100°C as compared to the bare Si(001) surface. These results may have important implications in source/drain engineering in sub-100 nm Si CMOS (Complementary Metal Oxide Semiconductor) devices.

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Acknowledgments

Acknowledgement is made to National Science Foundation and Texas Advanced Technology Program for their support of this research.

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Correspondence to Janadass Shanmugam.

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Shanmugam, J., Coviello, M., Udeshi, D. et al. Suppression of Ni Silicide Formation by Se Passivation of Si(001). MRS Online Proceedings Library 810, 184–189 (2003). https://doi.org/10.1557/PROC-810-C4.1

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