Measurements of Ultra-Shallow Junction (USJ) Sheet Resistance with a Non-Penetrating Four Point Probe

Abstract

An accurate method to measure the four point probe (4PP) sheet resistance (Rs) of USJ Source-Drain structures is described. The new method utilizes Elastic Material probes (EM- probe) to form non-penetrating contacts to the silicon surface. The probe design is kinematic and the force is controlled to ensure elastic deformation of the probe material. The probe material is selected so that large direct tunneling currents can flow through the native oxide thereby forming a low impedance contact. Sheet resistance measurements on USJ implanted P+/N structures with SIMS junction depths as shallow as 15 nm have been measured. The sheet resistance values obtained with the new EM-probe 4PP method were found to be consistent with expectations. In this paper, the method will be demonstrated on a variety of implanted USJ structures.

This is a preview of subscription content, access via your institution.

References

  1. [1]

    S. Wolf, Vol.3 The Submicron MOSFET, Ch. 3, (1994).

  2. [2]

    USJ Conference Short Course, Sixth International Workshop on: Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, Napa, CA (2001).

  3. [3]

    IEDM Conference Short Course, Sub-100 nm CMOS, (2001).

  4. [4]

    D.K. Schroder, Semiconductor Material and Device Characterization, J. Wiley and Sons, 1998

    Google Scholar 

  5. [5]

    R.J. Hillard, P.Y. Hung, William Chism, C. Win Ye, W.H. Howland, L.C. Tan and C.E. Kalnas, Characterization and Metrology for ULSI Technology AIP Conf. Proceedings 683, p. 796, (2003).

    CAS  Google Scholar 

  6. [6]

    SSM SRP Seminar (2002).

Download references

Acknowledgments

The authors are grateful to Epion Corporation for providing the P+/N USJ samples. We thank Dr. James Chen of Four Dimensions, Inc. for the Hg Four Point Probe measurements.

Author information

Affiliations

Authors

Corresponding authors

Correspondence to Robert J. Hillard or John O. Borland.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Hillard, R.J., Mazur, R.G., Alexander, W.J. et al. Measurements of Ultra-Shallow Junction (USJ) Sheet Resistance with a Non-Penetrating Four Point Probe. MRS Online Proceedings Library 810, 56–61 (2003). https://doi.org/10.1557/PROC-810-C11.6

Download citation