Real-time optical monitoring of gas phase dynamics for the growth of InN at elevated pressures

Abstract

The request for increased performance in high-power/high-frequency optoelectronic devices requires new methods for the fabrication of high quality III nitride alloys that exhibit large thermal decomposition pressure such as InN and related materials. To extend the process and growth window towards elevated pressures, a high-pressure CVD system with integrated real time optical characterization techniques has been constructed. The built-in real-time monitoring techniques allow the characterization of gas flow dynamics, precursor decomposition kinetics, as well as the monitoring of the crucial steps of nucleation and film formation. The gas flow dynamics has been characterized and the process parameter are obtained under which the thin film growth process can be maintained under laminar flow condition. Laser light scattering (LLS) has been proven as the most robust optical tool to characterize the onset of turbulence.

This is a preview of subscription content, access via your institution.

References

  1. [1]

    H. Amano, I. Akasaki, K. Hiramatsu, N. Koide, N. Sawaki, Thin Solid Films 163, 415 (1988).

    CAS  Article  Google Scholar 

  2. [2]

    S. Nakamura, Jpn. J. Appl. Phys. 30, L1705 (1991).

    Article  Google Scholar 

  3. [3]

    T. Sasaki, T. Matsuoka, J. Appl. Phys. 77(1), p. 192 (1995).

    CAS  Article  Google Scholar 

  4. [4]

    V. Yu. Davydov, A.A. Klochikhin, V.V. Emtsev, D.A. Kurdyukov, S.V. Ivanov, V.A. Vekshin, F. Bechstedt, J. Furthmüller, J. Aderhold, J. Graul, A.V. Mudryi, H. Harima, A. Hashimoto, A. Yamamoto, E.E. Haller, Physica Status Solidi B, 234(3) 787–795 (2002).

    CAS  Article  Google Scholar 

  5. [5]

    Fuh-Hsiang Yang, Jih-Shang Hwang, Kuei-Hsien Chen, Ying-Jay Yang, Lee Tzung-Han, Luu-Gen Hwa and Li-Chyong Chen, Thin Solid Films, 405(1–2), 194–197 (2002).

    CAS  Article  Google Scholar 

  6. [6]

    V.Ya. Malakhov, Solar Energy Materials and Solar Cells, 76(4), 637–646 (2003).

    CAS  Article  Google Scholar 

  7. [7]

    T. Matsuoka, H. Okamoto, M. Nakao, H. Harima, E. Kurimoto, Appl. Phys. Lett. 81(7), 1246–1248 (2002).

    CAS  Article  Google Scholar 

  8. [8]

    J.B. McChesney, P.M. Bridenbaugh and P.B. O’Connor, Mater. Res. Bull. 5, 783 (1970).

    Article  Google Scholar 

  9. [9]

    N. Dietz, S. McCall, K.J. Bachmann, Proceedings of the Microgravity Conference 2000, Huntsville AL. June 6–8, NASA/CP-2001–210827, 176–181 (2001).

    Google Scholar 

  10. [10]

    S. D. McCall and K. J. Bachmann, Mat. Res. Soc. Symp. Proc. Vol. 693, I3.13.1–8 (2002).

    Article  Google Scholar 

  11. [11]

    B. H. Cardelino, C. E. Moore, C. A. Cardelino, S. D. McCall, D. O. Frazier, K. J. Bachmann; J. Physical Chemistry A 107, 3708–3718 (2003).

    CAS  Google Scholar 

  12. [12]

    N. Dietz, V. Woods, S. McCall and K.J. Bachmann, Proceedings of the Microgravity Conference 2002, NASA/CP-2003–212339, 169–181 (2003).

    Google Scholar 

  13. [13]

    L. D. Landau and E. M. Lifshitz, “Fluid Mechanics”, ISBN: 0750627670, Butterworth-Heinemann; 2nd ed. (1987).

    Google Scholar 

Download references

Acknowledgments

This work has been supported by NASA under the grant # NAG8-1686. M. S. gratefully acknowledges the support of the Alexander von Humboldt-Foundation.

Author information

Affiliations

Authors

Corresponding author

Correspondence to N. Dietz.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Dietz, N., Born, H., Strassburg, M. et al. Real-time optical monitoring of gas phase dynamics for the growth of InN at elevated pressures. MRS Online Proceedings Library 798, 152–157 (2003). https://doi.org/10.1557/PROC-798-Y10.45

Download citation