The request for increased performance in high-power/high-frequency optoelectronic devices requires new methods for the fabrication of high quality III nitride alloys that exhibit large thermal decomposition pressure such as InN and related materials. To extend the process and growth window towards elevated pressures, a high-pressure CVD system with integrated real time optical characterization techniques has been constructed. The built-in real-time monitoring techniques allow the characterization of gas flow dynamics, precursor decomposition kinetics, as well as the monitoring of the crucial steps of nucleation and film formation. The gas flow dynamics has been characterized and the process parameter are obtained under which the thin film growth process can be maintained under laminar flow condition. Laser light scattering (LLS) has been proven as the most robust optical tool to characterize the onset of turbulence.
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
H. Amano, I. Akasaki, K. Hiramatsu, N. Koide, N. Sawaki, Thin Solid Films 163, 415 (1988).
S. Nakamura, Jpn. J. Appl. Phys. 30, L1705 (1991).
T. Sasaki, T. Matsuoka, J. Appl. Phys. 77(1), p. 192 (1995).
V. Yu. Davydov, A.A. Klochikhin, V.V. Emtsev, D.A. Kurdyukov, S.V. Ivanov, V.A. Vekshin, F. Bechstedt, J. Furthmüller, J. Aderhold, J. Graul, A.V. Mudryi, H. Harima, A. Hashimoto, A. Yamamoto, E.E. Haller, Physica Status Solidi B, 234(3) 787–795 (2002).
Fuh-Hsiang Yang, Jih-Shang Hwang, Kuei-Hsien Chen, Ying-Jay Yang, Lee Tzung-Han, Luu-Gen Hwa and Li-Chyong Chen, Thin Solid Films, 405(1–2), 194–197 (2002).
V.Ya. Malakhov, Solar Energy Materials and Solar Cells, 76(4), 637–646 (2003).
T. Matsuoka, H. Okamoto, M. Nakao, H. Harima, E. Kurimoto, Appl. Phys. Lett. 81(7), 1246–1248 (2002).
J.B. McChesney, P.M. Bridenbaugh and P.B. O’Connor, Mater. Res. Bull. 5, 783 (1970).
N. Dietz, S. McCall, K.J. Bachmann, Proceedings of the Microgravity Conference 2000, Huntsville AL. June 6–8, NASA/CP-2001–210827, 176–181 (2001).
S. D. McCall and K. J. Bachmann, Mat. Res. Soc. Symp. Proc. Vol. 693, I3.13.1–8 (2002).
B. H. Cardelino, C. E. Moore, C. A. Cardelino, S. D. McCall, D. O. Frazier, K. J. Bachmann; J. Physical Chemistry A 107, 3708–3718 (2003).
N. Dietz, V. Woods, S. McCall and K.J. Bachmann, Proceedings of the Microgravity Conference 2002, NASA/CP-2003–212339, 169–181 (2003).
L. D. Landau and E. M. Lifshitz, “Fluid Mechanics”, ISBN: 0750627670, Butterworth-Heinemann; 2nd ed. (1987).
This work has been supported by NASA under the grant # NAG8-1686. M. S. gratefully acknowledges the support of the Alexander von Humboldt-Foundation.
About this article
Cite this article
Dietz, N., Born, H., Strassburg, M. et al. Real-time optical monitoring of gas phase dynamics for the growth of InN at elevated pressures. MRS Online Proceedings Library 798, 152–157 (2003). https://doi.org/10.1557/PROC-798-Y10.45