A method to fabricate nanometer scale SiC beams and nanoporous SiC shells using conventional microlithographic techniques combined with selective APCVD has been developed as an alternative to nanolithographic patterning and electrochemical etching. The process involves the selective deposition of poly-SiC films on patterned SiO2/polysilicon/SiO2 thin film multilayers on (100) Si substrates using a carbonization-based 3C-SiC growth process. This technique capitalizes on significant differences in the nucleation of SiC on SiO2 and polysilicon surfaces in order to form mechanically durable and chemically stable structures.
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Chen, L., Fu, X., Zorman, C. et al. Fabrication of Micro- and Nanoscale SiC Structures Using Selective Deposition Processes. MRS Online Proceedings Library 782, 22 (2003). https://doi.org/10.1557/PROC-782-A2.2