Abstract
High quality undoped AlGaN/GaN high electron mobility transistors(HEMTs) structures have been gorwn by Hydride Vapor Phase Epitaxy (HVPE). The morphology of the films grown on Al2O3 substrates is excellent with root-mean-square roughness of ∼0.2nm over 10×10μm2 measurement area. Capacitance-voltage measurements show formation of dense sheet of charge at the AlGaN/GaN interface. HEMTs with 1μm gate length fabricated on these structures show transconductances in excess of 110 mS/mm and drain-source current above 0.6A/mm. Gate lag measurements show similar current collapse characteristics to HEMTs fabricated in MBE- or MOCVD grown material.
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References
H. P. Maruska and J. J. Tietzer, Appl. Phys. Lett. 15, 367(1969).
R. J. Molnar, in “GaN-II”, ed. J. I. Peenkove and T. D. Movstakas, (Academic Press, NY 1999).
R. P. Vaudo and V. M. Phanse, Electrochem. Sco. Proc. 19-18, 79(1998).
D. Doppalapudi and T. D. Movstakus, in Handbook of Thin Films ed. H. S. Nalwa, Vol. 4 (Academic Press, NY 2002).
R. Molnar, W. Goetz, L. T. Rornano and N. M. Johnson, J. Cryst. Growth. 178, 147(1996).
T. Detchprohm, K. Hiramatsv, H. Amono and I. Alcasaki, Appl. Phys. Lett. 61, 2688(1992).
P. Gibart and B. Beaumant, in GaN-based Technologies, ed. M. Osinski (SPIE Optical Engineering Series, Washington, 2002).
H. Morhoc, Mat. Sci. Eng. R33, 135(2001).
M. K. Kelly, R. P. Vaudo, V. M. Phanse, L. Gorgens, O. Ambacher and M. Stutzmana, Jpn. J. Appl. Phys. 38, L217(1999).
S. S. Park, I.-W. Park and S. H. Chok, Jpn. J. Appl. Phys. 39, L1141(2000).
K. Lee and K. Auh, Jpn. J. Appl. Phys. 40, L13(2001).
S. T. Kim, Y. J. Lee, D. C. Moon, C. Hong and T. K. Soo, Semicond. Sci. Technol. 14, 278(1999).
Y. V. Melaik, K. V. Vassilevski, I. P. Nikitina, A. I. Babanin, Y. Davydov and A. V. Dmitriev, MRS Technol J. Nitride Semicond. Res. 2, 39(1997).
A. Wakahara, T. Yamamoko, K. Ishio, A. Yoshida, Y. Seki, K. Kainosho and O. Oda, Jpn. J. Appl. Phys. 39, 2399(2000).
O. Kryliovk, M. Reed, T. Dann and T. J. Anderson, Mat. Sci. Eng. B66, 26(1999).
K. Motoki, Jpn. J. Appl. Phys. 40, L140(2001).
S. Nagahamn, N. Iwasa, M. Senoh, T. Matsushita, Y. Sugimoto, H. Kikoyv, T. Kozaki, M. Suno, H. Matsumura, H. Vinemoko, K. Kocho and T. Mukai, Jpn. J. Appl. Phys. 39, L647(2000).
J. C. Zolper, Tech Digest IEDM 389, 16.1.1 (1999).
see for example, the papers in the special issue on GaN Electronics, IEEE Trans Electron. Dev. ED48, (2001), ed J. C. Zolper and V. K. Mishra .
R. T. Kemeley, H. B. Wallace and M. N. Yoder, Proc. IEEE 90, 1059(2002).
V. K. Mishra, P. Parikh and Y.-F. Wu, Proc. IEEE 90, 1022(2002).
R. J. Trew, Proc. IEEE 90, 1032(2002).
S. J. Pearton, F. Ren, A. P. Zhang and K. P. Lee, Mat. Sci. Eng. R.30, 55(2000).
J. W. Johnson, F. Ren, S. J. Pearton, A. G. Baca, J. Han, A. M. Dabiran and P. P. Chow, J. Nanosci. Nanotech. 2, 325(2002).
S. C. Binari, K. Ikossi, J. A. Roussos, W. Kruppa, D. Park, H. B. Dietrich, D. D. Koleske, A. E. Wickenden and R. L. Henry, IEEE Trans. Electron. Dev. 48, 465(2001).
B. Luo, J. W. Johnson, J. Kim, R. M. Mehandru, F. Ren, B. P. Gila, A. H. Onstine, C. R. Abernathy, S. J. Pearton, A. G. Baca, R. D. Briggs, R. J. Shul, C. Monier and J. Han, Appl. Phys. Lett. 80, 1661(2002).
J. Gillespie, R. C. Fitch, J. Sewell, R. Dettmer, G. Via, A. Crespo, T. Jenkins, B. Luo, R. Mehandru, J. Kim, F. Ren, B. P. Gila, A. H. Onstine, C. R. Abernathy and S. J. Pearton, IEEE Trans. Electron. Dev. 23, 505(2002).
B. Luo, R. Mehandru, J. Kim, F. Ren, B. P. Gila, A. H. Onstine, C. R. Abernathy S. J. Pearton, R. Fitch, J. Gillespie, T. Jenkins, J. Sewell, D. Via, A. Crespo and Y. Irokawa, J. Electrochem. Soc., 149, G613 (2002).
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Luo, B., Ren, F., Mastro, M.A. et al. HVPE-GROWN AlGaN/GaN HEMTs. MRS Online Proceedings Library 764, 23 (2002). https://doi.org/10.1557/PROC-764-C2.3
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DOI: https://doi.org/10.1557/PROC-764-C2.3