Real-time x-ray scattering study of homoepitaxial growth of SrTiO3 by sputtering

MRS Online Proceedings Library volume 749, Article number: 1714 (2002) Cite this article

Abstract

The real-time x-ray scattering measurements under in-situ sputtering conditions were employed to study the growth behavior of sputter-deposited SrTiO3 films on SrTiO3 (001) substrate. A condition for conformal growth between deposited layers and substrate was found by observing the oscillation fringe in the diffuse scattering of measured reflectivity. The azimuthal scan around surface Bragg peak of the film peak shows that the epitaxial relationship between film and substrate can be achieved by sputtering.

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

US$ 39.95

Tax calculation will be finalised during checkout.

References

  1. 1

    Y. Abe, M. Kawamura and K. Sasaki, Jpn. J. Appl. Phys., Part 1 36, 5175 (1998).

    Article  Google Scholar 

  2. 2

    L. Ryen, X. Wang, U. Helmersson, and E. Olsson, J. Appl. Phys. 85, 2828 (1999).

    CAS  Article  Google Scholar 

  3. 3

    K. B. Lyons and P.A. Fleury, Solid State Commun. 23, 477 (1977).

    CAS  Article  Google Scholar 

  4. 4

    R. Viana, P. Lunkenheimer, J. Hemberger, R. Bühmer, and A. Loidl, Phys. Rev. B 50, 601 (1994).

    CAS  Article  Google Scholar 

  5. 5

    H. Suzuki, H. Bando, Y. Otuka, and I. H. Inoue, J. Phys. Soc. Jpn. 65, L1529 (1996).

  6. 6

    H. Tabata, H. Tanaka, and T. Kawai, Appl. Phys. Lett. 65, 1970 (1994).

    CAS  Article  Google Scholar 

  7. 7

    S. Guo, H. Arwin, S. N. Jacobsen, K. Järrendahl, and U. Helmersson, J. Appl. Phys. 77, 5369 (1995).

    CAS  Article  Google Scholar 

  8. 8

    J. Y. Lee, J. Y. Juang, K. H. Wu, T. M. Uen, and Y. S. Gou, Surf. Sci. Lett. 449, (1–3) L235 (2000).

  9. 9

    J. Y. Juang, J. Y. Lee, Y. F. Chen, K. H. Wu, T. M. Uen, and Y. S. Gou, Physica B. 284–288, (1–4) 2099 (2000)

    Google Scholar 

  10. 10

    Hsin-Yi Lee, Wei-Der Chang, C.-H. Hsu, K. S. Liang, J.Y. Lee, J.Y. Juang, K.H. Wu, T.M. Uen, and Y.S. Gou, Thin solid films 418, 163 (2002).

    CAS  Article  Google Scholar 

  11. 11

    J. C.Jiang, X. Q. Pan, W. Tian, C. D. Theis, and D. G. Schlom, Appl. Phys. Lett. 74, 2851 (1999).

    CAS  Article  Google Scholar 

  12. 12

    M. Lippmaa, N. Nakagawa, M. Kawasaki, S. Ohashi, and H. Koinuma, Appl. Phys. Lett. 76, 2439 (2000).

    CAS  Article  Google Scholar 

  13. 13

    J. Aarts and P. K. Larsen, Surf. Sci. 188, 391 (1987).

    Article  Google Scholar 

  14. 14

    H. A. van der Vegt, H. M. van Pixteren, M. Lohmeier, E. Vlieg, and J. M. C. Thornton, Phys. Rev. Lett. 68, 3335 (1992).

    Article  Google Scholar 

  15. 15

    H. A. van der Vegt, J. Alvarez, X. Torrelles, S. Ferrer, and E. Vlieg, Phys. Rev. B 52, 17 443 (1995).

  16. 16

    E. Vlieg, A. W. Denier van der Gon, J. F. van der Veen, J. E. Macdonald, and C. Norris, Phys. Rev. Lett. 61, 2241 (1988).

    CAS  Article  Google Scholar 

  17. 17

    H. A. van der Vegt, W. J. Huisman, P. B. Howes, T. S. Turner, and E. Vlieg, Surf. Sci. 365, 205 (1996).

    Article  Google Scholar 

  18. 18

    M. S. Finney, C. Norris, P. B. Howes, and E. Vlieg, Surf. Sci. 277, 330 (1992).

    CAS  Article  Google Scholar 

  19. 19

    C. L. Nicklin, C. Norris, P. Steadman, J. S. G. Taylor, and P. B. Howes, Physica B 221, 86 (1996).

    CAS  Article  Google Scholar 

  20. 20

    K. A. Edwards, P. B. Howes, J. E. Macdonald, T. Hibma, T. Bootsma, and M. A. James, Physica B 221, 201 (1996).

    CAS  Article  Google Scholar 

  21. 21

    G. B. Stephenson, J. A. Eastman, C. Thompson, O. Auciello, L. J. Thompson, A. Munkholm, P. Fini, S. P. DenBaars, and J. S. Speck, Appl. Phys. Lett. 74, 3326 (1999).

    CAS  Article  Google Scholar 

  22. 22

    G. B. Stephenson, J. A. Eastman, O. Auciello, A. Munkholm, C. Thompson, P. H. Fuoss, P. Fini, S. P. DenBaars, and J. S. Speck, MRS BULLETIN. 24, 21 (1999).

    CAS  Article  Google Scholar 

  23. 23

    E. Weschke, C. Schüßler-Langeheine, R. Meier, G. Kaindl, C. Sutter, D. Abernathy, and G. Grübel, Phys. Rev. Lett. 79, 3954 (1997).

    CAS  Article  Google Scholar 

  24. 24

    S. K. Sinha, Physica B, 173, 25 (1991).

    CAS  Article  Google Scholar 

  25. 25

    S. K. Sinha, E. B. Sirota, S. Garoff, and H. B. Stanley, Phys. Rev. B, 38, 2297 (1988). 26. H.-Y. Lee, et al., to be published.

Download references

Author information

Affiliations

  1. National Synchrotron Radiation Research Center, 30077, Hsinchu, Taiwan

    Hsin-Yi Lee, C.-H. Hsu, Y.-W. Hsieh & K. S. Liang

Authors
  1. Hsin-Yi Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. C.-H. Hsu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Y.-W. Hsieh
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. K. S. Liang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Hsin-Yi Lee.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Lee, HY., Hsu, CH., Hsieh, YW. et al. Real-time x-ray scattering study of homoepitaxial growth of SrTiO3 by sputtering. MRS Online Proceedings Library 749, 1714 (2002). https://doi.org/10.1557/PROC-749-W17.14

Download citation