Adatom Diffusion on Strained Si(001)-(2×1) Surface


The effects of a buried germanium island inside silicon substrate on the silicon adatom diffusion on the substrate surface have been studied by kinetic Monte Carlo simulations. The confinement of adatoms caused by the strain field of the germanium island can clearly be seen. Moreover, due to the anisotropy in adatom diffusion the confinement in directions parallel and perpendicular to the dimer rows of the surface take place in different temperatures.

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Correspondence to Antti Kuronen.

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Kuronen, A., Henriksson, K. & Kaski, K. Adatom Diffusion on Strained Si(001)-(2×1) Surface. MRS Online Proceedings Library 749, 131 (2002).

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