Rapid Thermal Oxidation of Polysilicon and Silicon

Abstract

Growth kinetics of silicon dioxide films grown by rapid thermal processing on polysilicon and single crystal silicon films is described. Oxides were grown in pure oxygen and oxygen with up to 4% HCI. For process time in the 1 to 120 s, oxide films thicknesses in the 2 to 36 nm are obtained with a uniformity of ±2% across 100 mm wafers. These oxides show an interface density of states of 5×109 eV−1cm−2 after a 30 s post-oxidation anneal in nitrogen ambient at 1050 C.

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Nulman, J. Rapid Thermal Oxidation of Polysilicon and Silicon. MRS Online Proceedings Library 74, 641 (1986). https://doi.org/10.1557/PROC-74-641

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