The effect of chemical treatment on porous silicon: the role of alcohol

Abstract

We investigated the effect of the chemical etching on light-emitting porous silicon. It is well known that the treatment with the mixture of HF acid and ethanol noticeably enhances photoluminescent efficiency but the mechanism is not clarified yet. We found that ethanol plays a key role to oxidize silicon hydride species that dissolves with the aid of HF acid. In addition, the chemical treatment with methanol or propanol instead of ethanol gave the same result.

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Correspondence to Masato Ohmukai.

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Ohmukai, M., Honda, M., Kodama, Y. et al. The effect of chemical treatment on porous silicon: the role of alcohol. MRS Online Proceedings Library 737, 39 (2002). https://doi.org/10.1557/PROC-737-F3.9

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