Patterned Structures of Silicon Nanocrystals Prepared by Pulsed Laser Interference Crystallization of Ultra-Thin A-Si:H Single-Layer

MRS Online Proceedings Library volume 737, Article number: 324 (2002) Cite this article

Abstract

We employ the method of phase-modulated KrF excimer pulsed laser interference crystallization to fabricate nanometer-sized crystalline silicon (nc-Si) with the two-dimensional (2D) patterned distribution within the ultra-thin a-Si:H single-layer. The local crystallization occurs after interference laser irradiation under proper energy density. The results of atomic force microscopy, Raman scattering spectroscopy, cross-section transmission electron microscopy and scanning electron microscopy demonstrate that Si nano-crystallites are formed within the initial a-Si:H single-layer, selectively located in the discal regions with the diameter of 350 nm and patterned with the same 2D periodicity of 2.0 μm as the phase-shifting grating. The results show that the present method can be used to fabricate patterned nc-Si films for device applications.

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

US$ 39.95

Tax calculation will be finalised during checkout.

References

  1. 1.

    L.T. Canham, Appl. Phys. Lett. 57 (1990) 1046

    CAS  Article  Google Scholar 

  2. 2.

    L. Tsybeskov, K.D. Hirschman, S.P. Duttagupta, M. Zacharias, P.M. Fauchet, J.P. Mccaffrey and D.J. Lockwood, Appl. Phys. lett 72 (1998), 43

    CAS  Article  Google Scholar 

  3. 3.

    X. Gu, H. Qin, H. Lu, K. Chen, X. Huang, J. Non-Cryst. Solids 227 (1996) 1168

    Google Scholar 

  4. 4.

    K.J. Chen, X.F. Huang, J. Xu, D. Feng, Appl. Phys. Lett. 61 (1992) 2069

    CAS  Article  Google Scholar 

  5. 5.

    U. Banin, Y.W. Cao, D. Katz, O. Millo, Nature 400 (1999) 542

    CAS  Article  Google Scholar 

  6. 6.

    A.D. Yoffe, Advanced in Physics 50 (2001) 1

    CAS  Article  Google Scholar 

  7. 7.

    Y. Wakayama, T. Tagami, S. Tanaka, Thin Solid Films, 350 (1999) 300

    CAS  Article  Google Scholar 

  8. 8.

    C.C. Striemer, R. Krishnan and P.M. Fauchet, Nano. Lett. 1(2001) 643

    CAS  Article  Google Scholar 

  9. 9.

    B. Dahlheimer, U. Karrer, C.E. Nebel, M. Stutzmanm, J. Non-Cryst. Solids 227–230(1998)

    Google Scholar 

  10. 10.

    M. Heintze, P.V. Santos, C.E. Nebel, M. Stutzmanm, Appl. Phys. Lett. 64 (1994) 3148

    CAS  Article  Google Scholar 

  11. 11.

    C.E. Nebel, Mat. Res. Soc. Symp, Proc. Vol. 420 (1996) 117

    CAS  Article  Google Scholar 

  12. 12.

    K.J. Chen, G.P. Luo, M.X. Wang, X. Gao, etc. J. Non-Cryst. Solids 227–230 (1998) 934

    Article  Google Scholar 

  13. 13.

    X.F. Huang, Z.F. Li, Z.G. Liu, K.J. Chen, J. Non-Cryst. Solids 198–200 (1996) 821

    Article  Google Scholar 

  14. 14.

    X.F. Huang, L. Wang, J. Li, etc. J. Non-Cryst. Solids 266–269 (2000) 1015

    Article  Google Scholar 

  15. 15.

    M. Jiang, M.X. Wang, K.J. Chen, Chinese Journal of Lasers B8 (1999) 142

    Google Scholar 

  16. 16.

    G.X. Chen, K.J. Chen, X.K. Zhang, Phys. Status. Solidi., A 129 (1992) 421

    Article  Google Scholar 

  17. 17.

    L. Wang, J. Li, X.F. Huang, W. Li, K.J. Chen, Appl. Surf. Science 165 (2000) 85

    CAS  Article  Google Scholar 

Download references

Acknowledgments

We would like to give special thanks to Prof. Juu Xu and Lin Kang of NJU for useful discussions and Prof.Xiaoning Zhao. Jiancang Shen and Xuefei Li of NJU for TEM and Raman and AFM measurements. The authors would also like to acknowledge the supports of State Key Program for Basic Research of China (Grant No.2001 CB 610503), the National Nature Science Foundation of China (Grant No.90101020 and 60071019), and Nature Science Foundation of Jiangsu Province (BK2001028. BG2001002). This work is also partly supported by the XPTND of Korea MOST.

Author information

Affiliations

  1. National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing, 210093, China

    Xiaowei Wang, Feng Qiao, Leyi Zhu, Wei Li, Jian Li, Xinfan Huang & Kunji Chen

Authors
  1. Xiaowei Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Feng Qiao
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Leyi Zhu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Wei Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Jian Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Xinfan Huang
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Kunji Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Xiaowei Wang.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Wang, X., Qiao, F., Zhu, L. et al. Patterned Structures of Silicon Nanocrystals Prepared by Pulsed Laser Interference Crystallization of Ultra-Thin A-Si:H Single-Layer. MRS Online Proceedings Library 737, 324 (2002). https://doi.org/10.1557/PROC-737-F3.24

Download citation