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Hardness depth profiling of ion-implanted polymer thin films | SpringerLink

Hardness depth profiling of ion-implanted polymer thin films


Hardness measurements in ion implanted polymers are complicated by the fact that the hardness of the material varies as a function of depth within the modified layer. This effect is induced by the distribution of deposited energy, which produces a depth-dependent variation in microstructure. We have used the depth-sensing nano-indentation technique to investigate the mechanical properties of thin films of ion-beam modified aromatic polymers deposited onto silicon substrates. The depth of the ion-modified surface layer was determined using the load variation technique from the hardness and elastic module depth profile and the depth dependence of the power law coefficient of the unloading curve.

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  1. [1]

    G. Gerlach and K. Sager Sensors and Actuators A43, 181 (1994).

    Article  Google Scholar 

  2. [2]

    R. Buchhold, A. Nakladal, G. Gerlach, M. Herold, G. Gauglitz, K. Sahre and K.-J. Eichhorn, Thin Solid Films 350, 178 (1999)

    Google Scholar 

  3. [3]

    R. Buchhold, A. Nakladal, G. Gerlach, K. Sahre, K.-J. Eichhorn, and G. Dlubek in Transducers’ 99, Digest Techn. Papers, Vol. 1, IEEJ, Sendai, 1999, p. 230.

    Google Scholar 

  4. [4]

    M. Guenther, K. Sahre, G. Suchaneck, G. Gerlach and K.-J. Eichhorn, Surface & Coatings Technology, 142-144, 482 (2001)

    Google Scholar 

  5. [5]

    A. Charlesby Radiat. Phys. Chem., 40, 11 (1992)

    Google Scholar 

  6. [6]

    G. Dlubek, F. Börner, R. Buchhold, K. Sahre, R. Krause-Rehberg and K.-J. Eichhorn, J. Polymer Sci B38, 3062 (2000)

    Google Scholar 

  7. [7]

    M. Guenther, G. Gerlach, G. Suchaneck, K. Sahre, K.-J. Eichhorn, B. Wolf, A. Deineka and L. Jastrabik Surface & Coatings Technology, (2002) (in print).

    Google Scholar 

  8. [8]

    E.H. Lee J. Mat Res. 9, 1043 (1994)

    CAS  Article  Google Scholar 

  9. [9]

    G. Rao, L. Riester and E.H. Lee in Beam-Solid Interactions for Materials Synthesis and Processing, edited by D.C. Jacobson, D.E. Luzzi, T.F. Heinz and M. Iwaki (Mat. Res. Symp. Proc. 354, Pittsburgh, PA, 1995) pp. 363–368.

  10. [10]

    E.G. Lee, G.R. Rao, M.B. Lewis and L.K. Mansur Nucl. Instrum. Meth. B74, 326 (1993)

    CAS  Article  Google Scholar 

  11. [11]

    B. Wolf, P. Paufler presented at the 2nd European workshop on nanoindentation, Hueckelhoven, Germany, Oct. 2001 (unpublished).

    Google Scholar 

  12. [12]

    J. F. Ziegler, J. P. Biersack and U. Littmark in The Stopping and Range of Ions in Solids, edited by J. F. Ziegler (Pergamon Press, New York, 1985) pp. 1–321.

  13. [13]

    W. C. Oliver, G. M. Pharr J. Mater. Res. 7, 1564 (1992)

    CAS  Article  Google Scholar 

  14. [14]

    A.K. Bhattacharya and W.D. Nix Int. J. Solid Structures 24, 1287 (1988)

    Article  Google Scholar 

  15. [15]

    S.P. Baker in Thin Films: Stresses and Mechanical Properties IV, edited by P. H. Townsend, T. P. Weihs, J. E. Sanchez Jr, and P. Borgesen Iwaki (Mat. Res. Symp. Proc. 308, Pittsburgh, PA, 1993) pp. 209–216.

    CAS  Google Scholar 

  16. [16]

    M. Guenther, G. Suchaneck, G. Gerlach, B. Wolf (unpublished)

  17. [17]

    S.I. Bulychev, V.P. Alekhin, M.Kh. Shorshorov, A.P. Ternovskii and G.D. Shnyrev Zavod. Lab. 41, 1137 (1975)

    CAS  Google Scholar 

  18. [18]

    S.I. Bulychev, V.P. Alekhin, M.Kh. Shorshorov and A.P. Ternovskii Probl. Prichn. 9, 76 (1976).

    Google Scholar 

  19. [19]

    B.J. Briscoe and K.S. Sebastian Proc. Royal Soc. London A452, 439 (1996)

    Google Scholar 

  20. [20]

    M.R. VanLandingham, J.S. Villarrubia, W.F. Guthrie and G.F. Meyers Macromol. Symp. 167, 15 (2001)

    Google Scholar 

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Correspondence to Gunnar Suchaneck.

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Suchaneck, G., Wolf, B., Guenther, M. et al. Hardness depth profiling of ion-implanted polymer thin films. MRS Online Proceedings Library 725, 412 (2002). https://doi.org/10.1557/PROC-725-P4.12

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