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Modeling of TED Point Defect Paramater Extraction

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Abstract

The work investigates simple transient enhanced diffusion (TED) behavior, which is a reflection of the interstitial behavior in the system. The analysis shows that TED depends mainly on two factors: the intial demage profiles and the DICI product. We find that, based on these two inputs, the extent of TED can be accurately diffusion capacity (DICI) which is compared to values previously extracted from diffcusion and silicon self-diffusion experiments.

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Authors and Affiliations

  1. Depatment of Materials Science and Engineering, University of Wasghington, Seattle, WA, 98195, USA

    Heidi Meyer & Scott T. Dunham

  2. Depatment of Electrical Enginerring, University of Washington, Seattle, WA, 98195, USA

    Scott T. Dunham

Authors
  1. Heidi Meyer
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  2. Scott T. Dunham
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Meyer, H., Dunham, S.T. Modeling of TED Point Defect Paramater Extraction. MRS Online Proceedings Library 717, 48 (2002). https://doi.org/10.1557/PROC-717-C4.8

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  • DOI: https://doi.org/10.1557/PROC-717-C4.8

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