Modeling of TED Point Defect Paramater Extraction

Abstract

The work investigates simple transient enhanced diffusion (TED) behavior, which is a reflection of the interstitial behavior in the system. The analysis shows that TED depends mainly on two factors: the intial demage profiles and the DICI product. We find that, based on these two inputs, the extent of TED can be accurately diffusion capacity (DICI) which is compared to values previously extracted from diffcusion and silicon self-diffusion experiments.

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Correspondence to Heidi Meyer.

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Meyer, H., Dunham, S.T. Modeling of TED Point Defect Paramater Extraction. MRS Online Proceedings Library 717, 48 (2002). https://doi.org/10.1557/PROC-717-C4.8

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