Electrical Characterization of Nanostructured Carbon Films Produced by Supersonic Cluster Beam Deposition

Abstract

Electrical conduction in nanostructured carbon (ns-C) films produced by deposition of a supersonic beam of neutral carbon clusters has been studied. The d.c. conduction properties of these films have been measured in-situ during the deposition process and ex-situ as a function of the temperature in vacuum and in ambient of different gases (H2, N2, CH4, He). The ns-C films exhibit an ohmic behavior with a room temperature resistivity in the range 10MΩcm-1GΩcm depending on the growth and storage conditions. Conductivity vs. temperature measured in vacuum in the range 300-400K is characterized by activation energies in the range 0.3-0.7eV, the current response does not differ significantly in gas atmosphere.

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Correspondence to Paolo Piseri.

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Piseri, P., Barborini, E., Bruzzi, M. et al. Electrical Characterization of Nanostructured Carbon Films Produced by Supersonic Cluster Beam Deposition. MRS Online Proceedings Library 704, 9381 (2001). https://doi.org/10.1557/PROC-704-W9.38.1

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