Electrical Characterization of Nanostructured Carbon Films Produced by Supersonic Cluster Beam Deposition


Electrical conduction in nanostructured carbon (ns-C) films produced by deposition of a supersonic beam of neutral carbon clusters has been studied. The d.c. conduction properties of these films have been measured in-situ during the deposition process and ex-situ as a function of the temperature in vacuum and in ambient of different gases (H2, N2, CH4, He). The ns-C films exhibit an ohmic behavior with a room temperature resistivity in the range 10MΩcm-1GΩcm depending on the growth and storage conditions. Conductivity vs. temperature measured in vacuum in the range 300-400K is characterized by activation energies in the range 0.3-0.7eV, the current response does not differ significantly in gas atmosphere.

This is a preview of subscription content, access via your institution.


  1. 1.

    N.F. Mott and E.A. Davis, Electronic processes in non-crystalline materials, Clarendon Press, Oxford, 1979

    Google Scholar 

  2. 2.

    K. Shimakawa, and K. Miyake, Phys. Rev. B 39, 7578 (1989).

    CAS  Article  Google Scholar 

  3. 3.

    C. Godet, Phyl. Mag. B 81, 205 (2001)

    CAS  Article  Google Scholar 

  4. 4.

    J. Robertson, Adv. Phys. 35, 317 (1986).

    CAS  Article  Google Scholar 

  5. 5.

    J. Robertson, Phyl. Mag. 66, 199 (1992)

    CAS  Article  Google Scholar 

  6. 6.

    V. Paillard, M. Meaudre, P. Melinon, V. Dupuis, J.P. Perez, S. Vignoli, A. Perez, R. Meaudre, J. Non-Cryst. Solids 191, 174 (1995)

    CAS  Article  Google Scholar 

  7. 7.

    E. Barborini, P. Piseri, A. Li Bassi, A. C. Ferrari, C. Bottani, P. Milani, Chem. Phys. Lett. 300, 633 (1999).

    CAS  Article  Google Scholar 

  8. 8.

    E. Barborini, P. Piseri, P. Milani, J. Phys. D 32, L105 (1999).

    CAS  Article  Google Scholar 

  9. 9.

    M. Bruzzi, P. Piseri, E. Barborini, G. Benedek, P. Milani, Diam. Relat. Mat. 10, 989 (2001).

    CAS  Article  Google Scholar 

  10. 10.

    J. Besold, R. Thielsch, N. Matz, C. Frenzel, R. Born, A. Möbius, Thin Solid Films 293, 96 (1997).

    CAS  Article  Google Scholar 

  11. 11.

    P. Milani, M. Ferretti, P. Piseri, C.E. Bottani, A. Ferrari, A Li Bassi, G. Guizzetti, M. Patrini J. Appl. Phys. 82, 5793 (1997).

    CAS  Article  Google Scholar 

Download references

Author information



Corresponding author

Correspondence to Paolo Piseri.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Piseri, P., Barborini, E., Bruzzi, M. et al. Electrical Characterization of Nanostructured Carbon Films Produced by Supersonic Cluster Beam Deposition. MRS Online Proceedings Library 704, 9381 (2001). https://doi.org/10.1557/PROC-704-W9.38.1

Download citation