Shock-Wave Synthesis of Nanoparticles During Ion Sputtering


We report electron microscopy studies of nanoparticles (500 ≤ n ≤ 104, where n is the number of atoms in a given cluster) that are sputtered from the surface by high-energy ion impacts. Measurements of the sizes of these clusters yielded an inverse power-law distribution with an exponent of-2 that is independent of irradiating ion species and total sputtering yield. This inverse-square dependence indicates that these nanoclusters are produced when shock waves, generated by sub-surface displacement cascades, impact and ablate the surface. Such nanoparticles consist of simple fragments of the original surface, i.e., ones that have not undergone any large thermal excursion. As discussed below, this “ion ablation” technique should therefore be useful for synthesizing nanoparticles of a wide variety of alloy compositions and phases.

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  1. [1]

    R. E. Honig, J. Appl. Phys. 29, 549 (1958).

    CAS  Article  Google Scholar 

  2. [2]

    W. O. Hofer in Sputtering by Particle Bombardment III, edited by R. Behrisch and K. Wittmaack, (Springer, Berlin, 1991) 15.

    Google Scholar 

  3. [3]

    C. Staudt, R. Heinrich and A Wucher, Nucl. Instrum. and Meth. B 164-165, 677 (2000).

    CAS  Article  Google Scholar 

  4. [4]

    S. R. Coon, W. F. Calaway, J. W. Burnett, M. J. Pellin, D. M. Gruen, D. R. Spiegel and J. M. White, Surf. Sci. 259, 275 (1991).

    CAS  Article  Google Scholar 

  5. [5]

    A. Wucher, M. Wahl, H. Oechsner, Nucl. Instrum. and Meth. B 82, 337 (1993).

    CAS  Article  Google Scholar 

  6. [6]

    L. E. Rehn, R. C. Birtcher, S. E. Donnelly, P. M. Baldo, and L. Funk, Phys. Rev. Lett. 87.(2001).

    Google Scholar 

  7. [7]

    I. S. Bitensky and E. S. Parilis, Nucl. Instrum. and Meth. B 21, 26 (1987).

    Article  Google Scholar 

  8. [8]

    C. W. Allen, L. L. Funk, E. A. Ryan and S. T. Ockers, Nucl. Instrum. and Meth. B 40/41, 553 (1989).

    Article  Google Scholar 

  9. [9]

    R. C. Birtcher, S. E. Donnelly and S. Schlutig, Phys. Rev. Lett. 85, 4968 (2000).

    CAS  Article  Google Scholar 

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Correspondence to L. E. Rehn.

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Rehn, L.E., Birtcher, R.C., Donnelly, S.E. et al. Shock-Wave Synthesis of Nanoparticles During Ion Sputtering. MRS Online Proceedings Library 704, 761 (2001).

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