Abstract
We examine the morphology and optical properties of fluorine doped tin oxide films prepared by the chemical vapor deposition of tetramethyltin and tin tetrachloride and the influence of these properties on light trapping in amorphous silicon solar cells having the structure glass/SnO2/P (a-Si1−xCx:H)-i-n/metal. Measured tin oxide properties include total and diffuse transmission as a function of wavelength, angular dependence of the scattered light, surface topography, and sheet resistance. Experimental quantum efficiency plots as a function of wavelength are presented and compared to computer calculations based on multilayer optics programs and measured optical constants. Using granular tin oxide, p-i-n cells 1 cm2 in area have been prepared with efficiencies exceeding 10%.
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Ellis, F.B., Delahoy, A.E., Böhm, M. et al. Experimental and Theoretical Results for Light Trapping in High Efficiency a-Si1−xCx:H/a-Si:H Solar Cells Prepared on Granular Tin Oxide. MRS Online Proceedings Library 70, 557–562 (1986). https://doi.org/10.1557/PROC-70-557
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DOI: https://doi.org/10.1557/PROC-70-557