Abstract
Using in situ ellipsometry with a 3.4 eV probe, we have characterized the initial nucleation and interface structure of a-Si:H and μc-Si deposited on oxide/c-Si substrates. Multilayered a-Si:H/a-SiNx:H structures have also been studied and non-uniformities have been modeled. In none of the reported data could we model thin film growth with thickness independent optical functions. Once a film becomes opaque, ellipsometry is very sensitive to changes in the thickness of surface roughness layers. As a result, roughness on single and multilayered a-Si:H films has been studied as well as the renucleation that results from stopping and then restarting the a-Si:H growth plasma.
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References
F. Hottier and J.B. Theeten, J. of Crystal Growth, 48, 644 (1980).
B. Drevillon, Thin Solid Films 130, 165 (1985).
For a review of EMA’s see: D.E. Aspnes, Thin Solid Films 89, 249 (1982).
For a recent series of articles on multilayers see: Proc. 11 Int. Conf. on Amorphous and Liquid Semiconductors, published as J. Non-Cryst. Solids 77&78, 1031–1104 (1985).
R.W. Collins, in Proc. of the Society of Photo-optical Instrumentation Engineers (SPIE), Los Angeles CA, (in press, 1986).
D.E. Aspnes, J. Opt. Soc. Am. 64, 812 (1975).
R.W. Collins and A. Pawlowski, J. Appl. Phys. 59, 1160 (1986).
H. Ugur, R. Johanson, and H. Fritzsche, in Tetrahedrally-Bonded Amorphous Semiconductors, eds. D. Adler and H. Fritzsche, (Plenum, 1985) p. 431.
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Collins, R.W. In Situ Studies of the Microstructure of a-Si:H Surfaces and Interfaces. MRS Online Proceedings Library 70, 361–366 (1986). https://doi.org/10.1557/PROC-70-361
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DOI: https://doi.org/10.1557/PROC-70-361