Glow Discharge Produce Amorphous SiC:H Thin Films


Amorphous hydrogenated silicon carbide alloy films (a-SiC:H) were produced by the decomposition of methane and silane in a glow discharge deposition system. A deposition rate of 13 Å/sec was achieved for good quality films. Amorphous SiC:H films of p+ type and n+ type of a band gap of 1.86 eV and 1.8 eV and the activation energy of 0.4 eV and 0.23 eV, respectively were obtained. Results show that p+ type and n+ type a-SiC:H films can be good window layers and good diffusion barriers for indium in polyimide/metal/n-i-p(p-i-n)/ITO amorphous silicon solar cells.

This is a preview of subscription content, access via your institution.


  1. 1.

    Y. Tawada, H. Okamoto and Y. Hamakawa, Appl. Phys. Lett. 39, 237 (1981).

    CAS  Article  Google Scholar 

  2. 2.

    Y. Tawada, K. Tsuge, M. Kondo, H. Okamoto, and Y. Hamakawa, J. Appl. Phys. 53, 5273 (1982).

    CAS  Article  Google Scholar 

  3. 3.

    S. Nakano, H. Kawada, T. Matsuoka, S. Kiyama, S. Sakai, K. Murata, H. Shibuya, Y. Kishi, I. Nagaoka, and Y. Kuwano, Technical Digest of the International PVSEC-1, Kobe, November 1984, Japan, 583.

  4. 4.

    H. Sakai, K. Maruyama, T. Yoshida, Y. Ichikawa, T. Hama, M. Ueno, M. Kamiyama and Y. Uchida, ref. 3, 591.

  5. 5.

    D.A. Anderson and W.E. Spear, Phil. Mag. 35, 1 (1977).

    CAS  Article  Google Scholar 

  6. 6.

    Y. Catherine, G. Turban, and B. Grolleau, Thin Solid Films 23, 765 (1981), also Y. Catherine, Ph.D. Thesis, Luniversitü de Nantes, 1981.

    Google Scholar 

  7. 7.

    Y. Tawada, K. Tsuge, K. Nishimura, M. Kondo, H. Okamoto and Y. Hamakawa, Proc. 3rd Photovoltaic Science and Engineering Conference in Japan, 1982, Japan. J. Appl. Phys. 21 (1982), supplement 21–22, 291.

    CAS  Article  Google Scholar 

  8. 8.

    R.I. Patel, J. Shirck, D.J. Olsen, N.T. Tran, K.A. Epstein, Proc. 18th IEEE Photovoltaic Specialists’ Conference, Las Vegas, Nevada, October, 1985.

  9. 9.

    R. Swanepoel, J. Phys. E16, 1219 (1983).

    Google Scholar 

  10. 10.

    R.I. Patel, Material Research Society Proceedings, 49, 1 (1985).

    Article  Google Scholar 

Download references

Author information



Corresponding author

Correspondence to N. T. Tran.

Additional information

This work was supported by the Solar Energy Research Institute subcontract No. ZB-4-03056-2.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Tran, N.T., Olsen, D.J., Patel, R.I. et al. Glow Discharge Produce Amorphous SiC:H Thin Films. MRS Online Proceedings Library 70, 325–330 (1986).

Download citation