CVD Diamond Thin Films for Alpha Particle Detector Application


In this paper, CVD diamond thin films for alpha particle detector have been prepared using hot-filament chemical vapor deposition (HFCVD) technique. Alpha particle detectors with coplanar and sandwich electrode geometry have been fabricated on the diamond films using liftoff technology. The detector performance has been tested using a 241 Am source with a characteristic energy of 5.5 MeV. An average charge collection efficiency of 32 % for the detector with coplanar and of 21 % for the detector with sandwich geometry is obtained.

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Correspondence to S. G. Wang.

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Wang, S.G., Zhang, Q., Yoon, S.F. et al. CVD Diamond Thin Films for Alpha Particle Detector Application. MRS Online Proceedings Library 692, 9321 (2001).

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