Growth of High Nitrogen Content GaAsN by Metalorganic Chemical Vapor Deposition


The incorporation of a high percentage of nitrogen in the GaAs lattice has been the subject of recent interest to reduce the bandgap while maintaining the nearly lattice matched condition to GaAs. We will report on the metalorganic chemical vapor deposition (MOCVD) of GaAsN using trimethylgallium (TMG), tertiarybutylarsine (TBA) and dimethylhydrazine (DMHy) organometallic sources in a hydrogen-free carrier gas. A nitrogen concentration as high as ∼8% in GaAsN was achieved. The effect of nitrogen concentration on the structural, optical and surface properties of GaAsN films will be discussed.

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Correspondence to J. C. Roberts.

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Roberts, J.C., Moody, B.F., Barletta, P. et al. Growth of High Nitrogen Content GaAsN by Metalorganic Chemical Vapor Deposition. MRS Online Proceedings Library 692, 191 (2001).

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