Investigation of MgO and Mg1-xTixO thin Films by Electrostatic Spray Deposition Method for a Protective Layer of AC-Plasma Display Panel

Abstract

MgO and Mg1-xTixO thin films were deposited by the electrostatic spray deposition method using Mg(tmhd)2 and Ti(OiPr)2(tmhd)2 as source materials and tetrahydrofuran and 1-octyl alcohol as solvents. The refractive index of the films shows a strong change from 1.73 for MgO to 2.39 for TiO2. The optical band gap energy values are 3.83 eV for TiO2 film and higher than 5.1 eV for films of Mg/(Mg+Ti) > 0.67. The discharge voltage and current increased with a content of Ti in Mg1-xTixO films. All these changes are closely associated with different Mg/(Mg+Ti) ratios of the films.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    T. Urade, T. Iemori, M. Osawa, N. Nakayama, IEEE Trans. Electron Devices 23, 313 (1976).

    Article  Google Scholar 

  2. 2.

    Y. Ushio, T. Banno, N. Matusa, Y. Saito, S. Baba, and A. Kinbara, Thin Solid Films 167(1-2), 299 (1988).

    CAS  Article  Google Scholar 

  3. 3.

    K. Yoshida, H. Uchiike, and M. Sawa, IEICE Trans. Electron. E82-C(10), 1798 (1999).

    Google Scholar 

  4. 4.

    C. H. Chen, M. H. J. Emond, E. M. Kelder, B. Meester, and J. Schoonman, J. Aerosol Sci. 30(7), 959 (1999).

    CAS  Article  Google Scholar 

  5. 5.

    S. G. Kim, K. H. Choi, J. H. Eun, H. J. Kim, and C. S. Hwang, Thin Solid Films 377-378, 694 (2000).

    Article  Google Scholar 

  6. 6.

    J. Schoonman, Solid State Ionics 135, 5 (2000).

    CAS  Article  Google Scholar 

  7. 7.

    B. Su, M. Wei, and K. L. Choy, Mat. Lett. 47, 83 (2001).

    CAS  Article  Google Scholar 

  8. 8.

    C-H. Park, Y-K. Kim, B-E Park, W-G Lee, J-S. Cho, Mat. Sci. & Eng. B60, 149 (1999).

    CAS  Article  Google Scholar 

  9. 9.

    G. V. Samsonov, The Oxide handbook, 2und ed. (IFI/Plenum data company, New York, 1982), p. 228.

    Google Scholar 

  10. 10.

    J. I. Pankove, Optical processes in semiconductors, (Prentice-Hall, New Jersey, 1971), p. 36.

    Google Scholar 

  11. 11.

    G. Timmer and G. Borstel, Phys. Rev. B43(6), 5098 (1991).

    Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to Soo Gil Kim.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Kim, S.G., Kim, YK., Park, CH. et al. Investigation of MgO and Mg1-xTixO thin Films by Electrostatic Spray Deposition Method for a Protective Layer of AC-Plasma Display Panel. MRS Online Proceedings Library 685, 5281 (2001). https://doi.org/10.1557/PROC-685-D5.28.1

Download citation