Electrical Properties of Srta2O6 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition (Peald)

Abstract

The SrTa2O6 (STO) thin films were prepared by plasma enhanced atomic layer deposition (PEALD) with alternating supply of reactant sources, Sr[Ta(C2H5O)5(C4H10NO)]2 {Strontium bis-[tantalum penta-ethoxide dimethyllaminoethoxide]; Sr(Ta(OEt)5▪dmae)2} and O2plasma. It was observed that the uniform and conformal STO thin films were successfully deposited using PEALD and the film thickness per cycle was saturated at about 0.8 nm at 300°C. Electrical properties of SrTa2O6 (STO) thin films prepared on Pt/SiO2/Si substrates with annealing temperatures have been investigated. While the grain size and dielectric constant of STO films increased with increasing annealing temperature, the leakage current characteristics of STO films slightly deteriorated. The leakage current density of a 40nm-STO film was about 5×10−8A/cm2 at 3V.

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References

  1. 1.

    C. H. L. Goodman, and M. V. Pessa, J. Appl. Phys. 60, R65 (1986).

    CAS  Article  Google Scholar 

  2. 2.

    G. D. Wilk, and R. M. Wallace, Appl. Phys. Lett. 74, 2854 (1999).

    CAS  Article  Google Scholar 

  3. 3.

    K. Eisenbeiser, J. M. Finder, Z. Yu, J. Ramdani, J. A. Curless, J. A. Hallmark, R. Droopad, W. J. Ooms, L. Salem, S. Bradshaw, and C. D. Overgaard, Appl. Phys. Lett. 76, 1324 (2000).

    CAS  Article  Google Scholar 

  4. 4.

    B. H. Lee, L. Kang, R. Nieh, W. J. Qi, and J. C. Lee, Appl. Phys. Lett. 76, 1926 (2000).

    CAS  Article  Google Scholar 

  5. 5.

    R. A. McKee, F. J. Walker, and M. F. Chisholm, Phys. Rev. Lett. 81, 3014 (1998).

    CAS  Article  Google Scholar 

  6. 6.

    J. W. Klaus, O. Sneh, and S. M. George, Science 278, 1934 (1997).

    CAS  Article  Google Scholar 

  7. 7.

    K. J. Hubbard, and D. G. Schlom, J. Mater. Res. 11, 2757 (1996).

    CAS  Article  Google Scholar 

  8. 8.

    P. A. Packan, Science 285, 2079 (1999).

    CAS  Article  Google Scholar 

  9. 9.

    M. Ritala, K. Kukli, A. Rahtu, P. I. Raisanen, M. Leskela, T. Sajavaara, and J. Keinonen, Science 288, 31 (2000).

    Article  Google Scholar 

  10. 10.

    E. Tokumitsu, G. Fujii, and H. Ishiwara, Appl. Phys. Lett. 75, 575 (1999).

    CAS  Article  Google Scholar 

  11. 11.

    J. F. Scott, and C. A. P. de Araujo, Science 246, 106 (1989).

    Article  Google Scholar 

  12. 12.

    W. J. Lee, C. H. Shin, C. R. Cho, J. S. Lyu, B. W. Kim, B. G. Yu, and K. I. Cho, Jpn. J. Appl.Phys. 38, 2039 (1999).

    CAS  Article  Google Scholar 

  13. 13.

    M. Crosbie, P. Wright, H. Davies, A. Jones, T. Leedham, P. O’Brien, and G. Critchlow, Chem. Vap. Deposition 5, 9 (1999).

    CAS  Article  Google Scholar 

  14. 14.

    J. S. Min, Y. W. Son, W. G. Kang, S. S. Chun, and S. W. Kang, Jpn. J. Appl. Phys. 37, 4999 (1998).

    CAS  Article  Google Scholar 

  15. 15.

    T. Suntola, and M. Simpson, Atomic Layer Epitaxy (Blackie, London, 1990).

    Google Scholar 

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Correspondence to Won-Jae Lee.

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Lee, WJ., Shin, CH., You, IK. et al. Electrical Properties of Srta2O6 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition (Peald). MRS Online Proceedings Library 685, 1331 (2001). https://doi.org/10.1557/PROC-685-D13.3.1

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