A Theory for Multi Damage Evaluation of TiN Thin Film


The present paper experimentally studies the cracking phenomena of a TiN thin film on a titanium alloy, and presents a new approach to predict the number of cracks under tensile load. An elastoplastic shear-lag model is developed to obtain the stress distribution caused by the film cracks, which is found to agree well with that calculated with FEM. The number of thin film cracks is predicted using a Monte Carlo simulation using the present approach, and favourably compared with the experimental results.

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Correspondence to Kazunori Misawa.

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Misawa, K., Okabe, T., Yanaka, M. et al. A Theory for Multi Damage Evaluation of TiN Thin Film. MRS Online Proceedings Library 653, 710 (2000). https://doi.org/10.1557/PROC-653-Z7.10

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