A Theory for Multi Damage Evaluation of TiN Thin Film

Abstract

The present paper experimentally studies the cracking phenomena of a TiN thin film on a titanium alloy, and presents a new approach to predict the number of cracks under tensile load. An elastoplastic shear-lag model is developed to obtain the stress distribution caused by the film cracks, which is found to agree well with that calculated with FEM. The number of thin film cracks is predicted using a Monte Carlo simulation using the present approach, and favourably compared with the experimental results.

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References

  1. 1.

    M.S. Hu and A. G. Evans. The cracking and decohesion of thin films on ductile substrates. Acta Metall., 37(1989), pp. 917–925

    CAS  Article  Google Scholar 

  2. 2.

    J. L. Beuth Jr., Cracking of thin bonded films in residual tension. Int. J. Solids Structures, 29(1992), pp. 1657–1675

    Article  Google Scholar 

  3. 3.

    W. H. Press, B. P. Flannery, S. A. Teukolsky and W. T. Vetterling. Numerical recipes in C., Cambridge University Press (1993)

    Google Scholar 

  4. 4.

    W. A. Curtin, A. N. Netravali and J. W. Park. Strength distribution of Carborundum polycrystalline SiC fibers as derived from the single fiber composite. J. Mater. Sci., 29(1994), pp.4718–4728

    CAS  Article  Google Scholar 

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Correspondence to Kazunori Misawa.

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Misawa, K., Okabe, T., Yanaka, M. et al. A Theory for Multi Damage Evaluation of TiN Thin Film. MRS Online Proceedings Library 653, 710 (2000). https://doi.org/10.1557/PROC-653-Z7.10

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