Strain-Induced Diffusion in Strained Sige/Si Heterostructures


Diffusivity of a strained heterostructure was theoretically investigated, and general diffusion equations with strain potential were deduced. There was an additional diffusivity by the strain potential gradient as well as by the concentration gradient. The strain-induced diffusivity was a function of concentration, and its temperature dependence was formulated. The activation energy of the strain-induced diffusivity was measured by high-resolution transmission electron microscopy. This result can be generally applied for the investigation of the diffusion in strained heterostructures.

This is a preview of subscription content, access via your institution.


  1. 1.

    C.K. Maiti, L.K. Bera, and S. Chattopadhyay, Semicon. Sci. Technol. 13, 1225 (1998).

    CAS  Article  Google Scholar 

  2. 2.

    H. Klauk, T.N. Jackson, S.F. Nelson, and J.O. Chu, Appl. Phys. Lett. 68, 1975 (1996).

    CAS  Article  Google Scholar 

  3. 3.

    N.E.B. Cowern, P.C. Zalm, P. VAN DER Sluis, D.J. Gravesteijn, and W.B. de Boer, Phys. Rev. Lett. 72, 2585 (1994).

    CAS  Article  Google Scholar 

  4. 4.

    B. Voigtländer, and M. Kästner, Phys. Rev. B 60, R5212 (1999).

    Article  Google Scholar 

  5. 5.

    J.-M. Baribeau, R. Pascual, and S. Saitomo, Appl. Phys. Lett. 57, 1502 (1990).

    CAS  Article  Google Scholar 

  6. 6.

    K. Dettmer, W. Freiman, M. Levy, Y.L. Khait, and R. Beserman, Appl. Phys. Lett. 66, 2376 (1995).

    CAS  Article  Google Scholar 

  7. 7.

    L. Kubler, D. Dentel, J.L. Bischoff, C. Ghica, C. Ulhaq-Bouillet, and J. Werckmann, Appl. Phys. Lett. 73, 1053 (1998).

    CAS  Article  Google Scholar 

  8. 8.

    J.H. van der Merwe, J. Appl. Phys. 34, 123 (1963).

    Article  Google Scholar 

  9. 9.

    P.G. Shewmon, Diffusion in Solids, McGraw-Hill, 1963, pp. 115–136.

    Google Scholar 

  10. 10.

    S.S. Iyer, and F.K. LeGoues, J. Appl. Phys. 65, 4693 (1989).

    CAS  Article  Google Scholar 

  11. 11.

    J. Crank, The Mathematics of Diffusion, Clarendon Press, 1975, pp. 104–136.

    Google Scholar 

  12. 12.

    G.L. McVay, and A.R. DuCharme, Phys. Rev. B 9, 627 (1974).

    CAS  Article  Google Scholar 

Download references

Author information



Corresponding author

Correspondence to Y. S. Lim.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Lim, Y.S., Lee, J.Y., Kim, H.S. et al. Strain-Induced Diffusion in Strained Sige/Si Heterostructures. MRS Online Proceedings Library 648, 112 (2000).

Download citation