Surface Modification of Si Field Emitter Arrays for Vacuum Sealing

Abstract

Vacuum packaging is a very important issue for vacuum microelectronics devices, especially for field emission displays. Emission current from the field emitter array (FEA), however, is known to decrease significantly after the vacuum packaging process. The current decrease is caused by heating treatment in the vacuum sealing process. In the present paper, the effect of the heating treatment on Si FEA was investigated and CHF3 plasma treatment was proposed for avoiding the problem. The Si FEA was exposed to plasma for 15sec and emission characteristics were measured before and after the vacuum sealing process using frit. It was confirmed that CHF3 plasma treatment was very effective for avoiding the emission degradation of the Si FEA. Details of the heating damage and CHF3 plasma treatment are described.

This is a preview of subscription content, access via your institution.

Reference

  1. 1.

    T. Hirano, S. Kanemaru, H. Tanoue, and J. Itoh, Jpn. J. Appl. Phys. 35, 6637 (1996).

    CAS  Article  Google Scholar 

  2. 2.

    J. W. Jeong, B. K. Ju, D. J. Lee, Y. H. Lee, N. Y. Lee, Y. W. Ko, Y. G. Moon, D. J. Choi, and M. H. Oh, in Technical Digest of the 11th Int’l Vacuum Microelectronics Conf. (Asheville, U.S.A., 1998), p.42.

    Google Scholar 

  3. 3.

    H. Kim, B. K. Ju, K. B. Lee, M. S. Kang, J. Jang, and M. H. Oh, in Technical Digest of the 11th Int’l Vacuum Microelectronics Conf. (Asheville, U.S.A., 1998), p.67.

    Google Scholar 

  4. 4.

    F. Ito, K. Konuma and A. Okamoto, J. Vac. Sci. Technol. B16, 783 (1999).

    Google Scholar 

  5. 5.

    K. Betsui, in echnical Digest of the 4th Int’l Vacuum Microelectronics Conf. (Nagahama, Japan, 1991), p.26.

    Google Scholar 

  6. 6.

    G. J. Coyle Jr., and G. S. Oehrlein, Appl. Phys. Lett. 47, 604 (1985).

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to M. Nagao.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Nagao, M., Tanabe, H., Kobayashi, T. et al. Surface Modification of Si Field Emitter Arrays for Vacuum Sealing. MRS Online Proceedings Library 621, 131 (2000). https://doi.org/10.1557/PROC-621-Q1.3.1

Download citation