Growth of InN by MBE

MRS Online Proceedings Library volume 595, Article number: 330 (1999) Cite this article

Abstract

A series of experiments were performed to explore the growth of InN by Molecular Beam Epitaxy (MBE). The growth conditions were optimized based on the study of RHEED during growth and InN dissociation experiments. Characterization of the InN thin films were performed by various techniques such as TEM and XRD.

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References

  1. [1]

    S. Strite, H. Morkoç, J. Vac. Sci. Technol. B 10, 1237 (1992).

    CAS  Article  Google Scholar 

  2. [2]

    S. Nakamura, M. Senoh, N. Iwasa, S. Nagahama, T. Yamada, and T. Mukai, Jpn. J. Appl. Phys., 34, L1332 (1995).

    CAS  Article  Google Scholar 

  3. [3]

    S. Nakamura, M. Senoh, S. Nagahata, N. Iwasa, T. Yamada, T. Matsushita, H. Kiyoku, Y. Sugimoto, Jpn. J. Appl. Phys. 35, L74 (1996).

    CAS  Article  Google Scholar 

  4. [4]

    M. Shimizu, K. Hiramatsu, and N. Sawaki, J. Cryst. Growth 145, 209 (1994).

    CAS  Article  Google Scholar 

  5. [5]

    R. Singh, D Doppalapudi, T.D. Moustakas, and L.T. Romano, Appl. Phys. Lett. 70, 089 (1997).

    Google Scholar 

  6. [6]

    K. Kubota, Y. Kobayashi, and K. Fujimoto, J. Appl. Phys. 66, 2984 (1989).

    CAS  Article  Google Scholar 

  7. [7]

    C.R. Abernathy, S.J. Pearton, F. Ren, and P.W. Wisk, J. Vac. Sci. Technol. B11, 179 (1993).

    Article  Google Scholar 

  8. [8]

    T.J. Kistenmacher, S.A. Ecelberger, and W.A. Bryden, J. Appl. Phys. 74, 1684 (1993).

    CAS  Article  Google Scholar 

  9. [9]

    Y. Sato and S. Sato, J. Cryst. Growth 144, 15 (1994).

    CAS  Article  Google Scholar 

  10. [10]

    Q. Guo, T. Yamamura, A. Yoshida, and N. Itoh, J. Appl. Phys. 75, 4927 (1994).

    CAS  Article  Google Scholar 

  11. [11]

    W.E. Hoke, P.J. Lemonias, and D. G. Weir, J. Cryst. Growth 111, 1024 (1991).

    CAS  Article  Google Scholar 

  12. [12]

    Y. Pan, W. Lee, C. Shu, H. Lin, C. Chiang, H. Chang, D. Lin, M. Lee, W. Chen, Jpn. J. Appl. Phys. 38, 645 (1999).

    CAS  Article  Google Scholar 

  13. [13]

    S. Yamaguchi, M. Kariya, S. Nitta, T. Takeuchi, C. Wetzel, H. Amano, and I. Akasaki, J. Appl. Phys. 85, 7682 (1999).

    CAS  Article  Google Scholar 

  14. [14]

    J.W. Trainor and K. Rose, J. Electron. Mater. 3, 821 (1974).

    CAS  Article  Google Scholar 

  15. [15]

    A.M. Vorb’ev, G.V. Evseeva, and L.V. Zenkevich, Russ. J. Phys. Chem. 45, 1501 (1971).

    Google Scholar 

  16. [16]

    R.D. Jones and K. Rose, J. Phys. Chem. Solids 48, 587 (1987).

    CAS  Article  Google Scholar 

  17. [17]

    R. Held, D.E. Crawford, A.M. Johnston, A.M. Dabiran, and P.I. Cohen, J. Electron. Mater. 26, 272 (1997).

    CAS  Article  Google Scholar 

  18. [18]

    A. Koukitu and H. Seki, Jpn. J. Appl. Phys. 36, L750 (1997).

    CAS  Article  Google Scholar 

Download references

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Affiliations

  1. School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, 47907, USA

    W. L. Chen & R. L. Gunshor

  2. Sandia National Laboratories, Albuquerque, NM, 87185, USA

    Jung Han

  3. Japan Advanced Institute of Science and Technology, Ishikawa, Japan

    K. Higashimine & N. Otsuka

Authors
  1. W. L. Chen
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  2. R. L. Gunshor
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  3. Jung Han
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  4. K. Higashimine
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  5. N. Otsuka
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Correspondence to W. L. Chen.

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Chen, W.L., Gunshor, R.L., Han, J. et al. Growth of InN by MBE. MRS Online Proceedings Library 595, 330 (1999). https://doi.org/10.1557/PROC-595-F99W3.30

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