Growth of InN by MBE

Abstract

A series of experiments were performed to explore the growth of InN by Molecular Beam Epitaxy (MBE). The growth conditions were optimized based on the study of RHEED during growth and InN dissociation experiments. Characterization of the InN thin films were performed by various techniques such as TEM and XRD.

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Correspondence to W. L. Chen.

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Chen, W.L., Gunshor, R.L., Han, J. et al. Growth of InN by MBE. MRS Online Proceedings Library 595, 330 (1999). https://doi.org/10.1557/PROC-595-F99W3.30

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