High-Sensitivity Visible-Blind AlGaN Photodiodes and Photodiode Arrays


Visible-blind UV cameras based on a 32 × 32 array of backside-illuminated GaN/AlGaN p-i-n photodiodes have been successfully demonstrated. The photodiode arrays were hybridized to silicon readout integrated circuits (ROICs) using In bump bonds. Output from the UV cameras were recorded at room temperature at frame rates of 30–240 Hz. These new visible-blind digital cameras are sensitive to radiation from 285–365 nm in the UV spectral region.

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  1. 1.

    S. Nakamura, T. Mukai, M. Senoh, App. Phys. Lett. 64, 1687 (1994).

    CAS  Article  Google Scholar 

  2. 2.

    G. Fasol Nakamura, The Blue Laser Diode, published bySpringer-Verlag (Heidelberg), 0 (1997). ISBN 3-540-61590-3, 343 pages.

    CAS  Google Scholar 

  3. 3.

    Dennis K. Wickenden, Zhenchun Huang, D. Brent Mott, and Peter K. Shu, Johns Hopkins APL Technical Digest, 18(2)217 (1997).

    CAS  Google Scholar 

  4. 4.

    Z.C. Huang, D.B. Mott, P.K. Shu, CP420, Space Technology and Applications International Forum-1998, American Institute of Physics Conference Proceedings 1-56396-747 (1998).

    Google Scholar 

  5. 5.

    T.Z.C. Huang, D.B. Mott, A. La, paper presented at SPIE Conference, Denver (July, 1999), to be published in SPIE conference proceedings.

    Google Scholar 

  6. 6.

    Hadis Morkoc, Naval Research Reviews 51, 24 (1999). This recent review article can be accessed on the World Wide Web at http://www.onr.navy.mil/onr/pubs.htm. It contains many photodetector references.

    Google Scholar 

  7. 7.

    Wei Yang, Thomas Novova, Subash Krishnankutty, Robert Torreano, Scott McPherson, Holly Marsh, Appl. Phys. Lett. 73(8), 1086 (1998).

    CAS  Article  Google Scholar 

  8. 8.

    J.D. Brown, Zhonghai Yu, J. Matthews, S. Harney, J. Boney, J.F. Schetzina, J.D. Benson, K.W. Dang, C. Terrill, Thomas Nohava, Wei Yang, Subash Krishnankutty, MRS Internet J. Nitride Semicond. Res. 4, 9(1999).

    Article  Google Scholar 

  9. 9.

    K. Linthicum, D. Hanser, T. Zheleva, O.K. Nam, R.F. Davis, Naval Research Reviews 51, 44 (1999). This review paper on ELO and pendio-epitaxy can be accessed on the World Wide Web at http://www.onr.navy.mil/onr/pubs.htm.

    Google Scholar 

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Correspondence to J. D. Brown.

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Brown, J.D., Matthews, J., Harney, S. et al. High-Sensitivity Visible-Blind AlGaN Photodiodes and Photodiode Arrays. MRS Online Proceedings Library 595, 19 (1999). https://doi.org/10.1557/PROC-595-F99W1.9

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