Abstract
Nanostructured carbon films have been grown by deposition of supersonic cluster beams. A novel pulsed microplasma cluster source allows to obtain cluster beams of high intensity and stability. Cluster growth and beam formation have been charaterized. Separation effects typical of supersonic expansions cause inhomogeneities of cluster distribution in the beam, depending on their masses. This effect, observed for the first time, has been carefully characterized. The deposited films have a low density porous structure based on nanometer-size grains. The coordination is essentially three-fold with a large number of defects. Film density, morphology and surface roughness can be controlled by varying the precursor cluster mass distribution. Applications of cluster-assembled carbon films will be presented.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
J. Robertson, Pure & Appl. Chem. 66, 1789 (1994)
M.W. Geis, M.A. Tamor, in Encyclopedia of Applied Physics, vol. 5,VCH Publisher, 1993
B.F. Coll, J.E. Jaskie, J.L. Markham, E.P. Menu, A.A. Talin, P. von Allmen, Mat. Res. Soc. Symp. Proc. vol. 498, 185 (1998)
R.H. Baugham et al, Science 284, 1340 (1999)
C. Niu, E.K. Sichel, R. Hoch, H. Tennent, Appl. Phys. Lett. 70, 1480 (1997)
P. Milani, S. Iannotta, Cluster Beam Deposition of Nanostructured Materials,Springer Verlag, Berlin, 1999
E. Barborini, P. Piseri, A.C. Ferrari, A. Li Bassi, C.E. Bottani, P. Milani, Chem. Phys.Lett. 300, 633 (1999).
P. Milani, S. Iannotta, Cluster Beam Synthesis of Nanostructured Materials,Springer Verlag, Berlin, 1999
E. Barborini, P. Piseri, P. Milani, J. Phys. D: Appl. Phys. 10, LI05 (1999)
A.-L. Barabasi, H.E. Stanley, Fractal Concepts in Surface Growth,Cambridge University Press, Cambridge, 1995
P. Piseri, P. Milani S. Iannotta, Int. J. Mass Spectrom. Ion Proc. 135, 23 (1996)
D.T. Colbert et al, Science 266, 1218 (1994)
J. Soederlund, et al Phys. Rev. Lett. 80, 2386 (1998)
P. Piseri, A. Podestà, E. Barborini, P. Milani, J. Chem. Phys., submitted
J. Fernandez De La Mora, J. Rosell-Llompart, J. Chem. Phys. 91, 2603 (1989).
D. Donadio et al Phys. Rev. Lett. 83, 776 (1999)
S.T. Mayer, R.W. Pekala, J.L. Kaschmitter, J. Electrochem. Soc. 140, 446 (1993)
L. Diederich et al, Appl. Phys. Lett. 75, 2662 (1999)
A. C. Ferrari, et al, Europhys. Lett. 46, 245 (1999).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Milani, P., Piseri, P., Barborini, E. et al. Synthesis and Characterization of Cluster-Assembled Carbon Films. MRS Online Proceedings Library 593, 75–85 (1999). https://doi.org/10.1557/PROC-593-75
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-593-75