Amorphous Carbon-Silicon Alloys Prepared by a High Plasma Density Source

Abstract

The addition of silicon to hydrogenated amorphous carbon can have the advantageous effect of lowering the compressive stress, improving the thermal stability of its hydrogen and maintaining a low friction coefficient up to high humidity. Most experiments to date have been on a-C1-xSix:H alloys deposited by RF plasma enhanced chemical vapour deposition (PECVD). This method gives alloys with considerable hydrogen content and only moderate hardness. Here, we use a high plasma density source, the electron cyclotron wave resonance (ECWR) source, to prepare films with a high deposition rate. The composition and bonding in the alloys is determined by XPS, visible and UV Raman and FTIR spectroscopy. We find that it is possible to produce hard, low stress, low friction, almost humidity insensitive a-Cl.xSix:H alloys with a good optical transparency and a band gap over 2 eV.

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Correspondence to A. C. Ferrari.

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Ferrari, A.C., Racine, B., Morrison, N.A. et al. Amorphous Carbon-Silicon Alloys Prepared by a High Plasma Density Source. MRS Online Proceedings Library 593, 523–528 (1999). https://doi.org/10.1557/PROC-593-523

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