Structural and Mechanical Properties of Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition With Varying Laser Intensity


Diamond-like carbon (DLC) films have been prepared by pulsed laser deposition (PLD) (wavelength 248 nm), ablating highly oriented pyrolytic graphite (HOPG) at room temperature in a vacuum of 10−2Pa, at fluences between 0.5 and 35 Jcm−2. Films have been deposited on Si(100) with and without a SiC interlayer. Structural analysis, such as visible and UV Raman, Infrared and Electron Energy Loss (EEL) spectroscopies show that the films are hydrogen-free and undergo a transition, from mainly disordered graphitic to up to 80% tetrahedral amorphous carbon (ta-C), above a laser threshold fluence of 5 J cm−2. The measured residual stresses of as deposited ta-C films do not exceed 2 GPa. Scratch tests show excellent adhesion properties. Low friction coefficients (0.05-0.1) have been measured in ambient humidity. Nanoindentation indicates that film hardness is as high as 70 GPa

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  1. [1]

    T. A. Friedmann, J. P. Sullivan, J. A. Knapp, D. R. Tallant, D. M. Follstaedt, D. L. Medlin and P. B. Mirkarimi, Appl. Phys. Lett. 71, 3820 (1997)

    CAS  Article  Google Scholar 

  2. [2]

    P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. J. Amaratunga and W. I. Milne, Phys. Rev. B, 48 4777 (1993)

    CAS  Article  Google Scholar 

  3. [3]

    G. M. Pharr and W. C. Oliver, MRS Bulletin 7, 1564 (1992).

    Google Scholar 

  4. [4]

    S. Prawer, K. W. Nugent, Y. Lifshitz, G. D. Lempert, E. Grossman, J. Kulik, I. Avigal and R. Kalish, Diamond Rel. Mat. 5, 433 (1996).

    CAS  Article  Google Scholar 

  5. [5]

    C. Mapelli, C. Castiglioni, E. Meroni and G. Zerbi, K. Mullen, Phys. Rev. B, 60 12710 (1999).

    CAS  Article  Google Scholar 

  6. [6]

    A. C. Ferrari, J. Roberston, Phys. Rev. B, submitted.

  7. [7]

    K. W. R. Gilkes, H. S. Sands, D.N. Batchelder, J. Robertson, W.I. Milne, Appl. Phys. Lett., 70 1980 (1997)

    CAS  Article  Google Scholar 

  8. [8]

    B. Dishler, Amorphous Hydrogenated Carbon Films, EMRS Symp proc. Vol 17, ed. P. Koidl and P. Oelhafen (Les Editions de Physique, Paris, 1987)

  9. [9]

    A. Li Bassi, A. C. Ferrari, V. Stolojan, B. K. Tanner, J. Robertson, L. M. Brown, Diamond Relat. Mater., to be published (1999).

    Google Scholar 

  10. [10]

    X. Shi, D. Flynn, B. K. Tay, S. Prawer, K. W. Nugent, S. R. P. Silva, Y. Lifshitz and W. I. Milne, Phil. Mag. B 76, 351 (1997).

    Article  Google Scholar 

  11. [11]

    A. A. Voevodin, M. S. Donley and J. S. Zabinski, Surf. Coat. Technol. 92, 42 (1997).

    CAS  Article  Google Scholar 

  12. [12]

    A. A. Voevodin, M. S. Donley, J. S. Zabinski and J. E. Bultman, Surf. Coat. Technol. 76-77, 534 (1995).

    CAS  Article  Google Scholar 

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Bonelli, M., Ferrari, A.C., Fioravanti, A.P. et al. Structural and Mechanical Properties of Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition With Varying Laser Intensity. MRS Online Proceedings Library 593, 359–364 (1999).

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