Structural and Mechanical Properties of Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition With Varying Laser Intensity

MRS Online Proceedings Library volume 593, pages359–364(1999)Cite this article

Abstract

Diamond-like carbon (DLC) films have been prepared by pulsed laser deposition (PLD) (wavelength 248 nm), ablating highly oriented pyrolytic graphite (HOPG) at room temperature in a vacuum of 10−2Pa, at fluences between 0.5 and 35 Jcm−2. Films have been deposited on Si(100) with and without a SiC interlayer. Structural analysis, such as visible and UV Raman, Infrared and Electron Energy Loss (EEL) spectroscopies show that the films are hydrogen-free and undergo a transition, from mainly disordered graphitic to up to 80% tetrahedral amorphous carbon (ta-C), above a laser threshold fluence of 5 J cm−2. The measured residual stresses of as deposited ta-C films do not exceed 2 GPa. Scratch tests show excellent adhesion properties. Low friction coefficients (0.05-0.1) have been measured in ambient humidity. Nanoindentation indicates that film hardness is as high as 70 GPa

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Affiliations

  1. Istituto Nazionale per la Fisica della Materia (INFM) and Dipartimento di Fisica, Università di Trento, 1-38050, Povo (TN), Italy

    M. Bonelli & A. Miotello

  2. Department of Engineering, Cambridge University, Cambridge, UK

    A. C. Ferrari

  3. Dipartimento di Ingegneria Nucleare, Politecnico di Milano, 1-20133, Milano, Italy

    A. P. Fioravanti

  4. Istituto Nazionale per la Fisica della Materia (INFM) and Dipartimento di Ingegneria Nucleare, Politecnico di Milano, 1-20133, Milano, Italy

    P. M. Ossi

Authors
  1. M. Bonelli
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  2. A. C. Ferrari
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  3. A. P. Fioravanti
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  4. A. Miotello
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  5. P. M. Ossi
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Correspondence to M. Bonelli.

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Bonelli, M., Ferrari, A.C., Fioravanti, A.P. et al. Structural and Mechanical Properties of Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition With Varying Laser Intensity. MRS Online Proceedings Library 593, 359–364 (1999). https://doi.org/10.1557/PROC-593-359

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