Abstract
Mass-selected ion-beam deposition using 120 eV C+ ions has been used to grow a carbon film on a Si substrate held at 200° C. The structure of the film has been characterized by transmission electron microscopy and electron energy loss spectroscopy. The film is graphitic and highly oriented with the c-axis lying parallel to the substrate. Moreover, the film is under significant biaxial stress such that the graphitic layer spacing is reduced by 4% from that of ambient pressure graphite. This oriented structure evolves due to the mobility of the carbon atoms at 200 °C. The material is sufficiently crystalline on the nanometer scale so as to produce Bragg diffraction discs in a convergent beam electron diffraction pattern using a 2.5 nm probe.
Similar content being viewed by others
References
S. Aisenberg and R. Chabot, J. Appl. Phys. 42, 2953 (1971).
Y. Lifshitz, S.R. Kasi, J.W. Rabalais, and W. Eckstein, Phys. Rev. B 41, 10468 (1990).
J. Robertson, Diamond Relat. Mater. 2, 984 (1993); 3, 361 (1994).
C.A. Davis, Thin solid Films 226, 30 (1993).
D.R. McKenzie, D. Muller, and B.A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991).
Y. Lifshitz, Diamond Relat. Mater. 8, 1659 (1999).
J. Kulik, G.D. Lempert, E. Grossman, D. Marton, J.W. Rabalais, and Y. Lifshitz, Phys. Rev. B 52, 15812 (1995).
Y. Lifshitz, G.D. Lempert, S. Rotter, I. Avigal, C. Uzan-Saguy, and R. Kalish, Diamond Relat. Mater. 2, 285 (1993).
Y. Yin, J. Zou, and D.R. McKenzie, Nucl. Instr. Meth. B 119, 587 (1996).
D.R. McKenzie and M.M.M. Bilek, J. Appl. Phys. 86, 230 (1999).
D.R. McKenzie and M.M.M. Bilek, J. Vac. Sci. Technol. A 16, 2733 (1998).
D.G. McCulloch, N.A. Marks, D.R. McKenzie, and S. Prawer, Nucl. Instr. Meth. B 106, 545 (1995).
G.A. Botton, C.B. Boothroyd, W.M. Stobbs, Ultramicroscopy 59, 93 (1995).
J. Fink, N. Nücker, H. Romberg, M. Alexander, and M. Knupfer, J. Electron Spectrosc. Rel. Phen. 66, 395 (1994).
E. Grossman, G.D. Lempert, Y. Lifshitz, D.G. Armour, S.E. Donnelly, J. Van der Berg, C. Cook, “In Situ and Ex Situ Studies of Growth Mechanisms of DLC Films Deposited by Mass Selected Ion Beams”, unpublished (presented in Diamond Films 96, Tours, France, 8-13 September 1996)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Kulik, J., Lempert, G., Grossman, E. et al. Oriented Graphitic Carbon Film Grown by Mass-Selected Ion Beam Deposition at Elevated Temperatures. MRS Online Proceedings Library 593, 305–310 (1999). https://doi.org/10.1557/PROC-593-305
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-593-305