Fluorinated Diamond-Like Carbon Films Produced by Plasma Immersion Ion Processing Technique

Abstract

Fluorinated diamond-like carbon (F-DLC) coatings were deposited on polished silicon substrates with plasma immersion ion processing (PIIP) technique. In the PIIP technique, pulsed glow discharge plasma from a mixture of acetylane and hexafluoroethane gases was used. Contact angle measurements were performed in order to see the un-wetting properties of the coatings. The film composition was measured with Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) and the hardness was measured with a Nanoindenter® II. The results clearly show that the un-wetting properties and hardness are strongly dependent on the fluorine incorporation in the F-DLC coatings. With optimized gas ratio of acetylane and hexafluoroethane gases, a combination of extremely good un-wetting properties and high hardness was achieved.

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Correspondence to M. Hakovirta.

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Hakovirta, M., Lee, D.H., He, X.M. et al. Fluorinated Diamond-Like Carbon Films Produced by Plasma Immersion Ion Processing Technique. MRS Online Proceedings Library 593, 285–290 (1999). https://doi.org/10.1557/PROC-593-285

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