Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique

Abstract

An all-optical technique based on laser excitation and detection of surface acoustic waves is capable of precise, fast, noncontact and nondestructive measurements of metal film thickness. The technique is integrated into a compact and robust instrument. Applications to metal interconnect process control in integrated circuit technology are presented.

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Correspondence to A.A. Maznev.

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Maznev, A., Banet, M., Gostein, M. et al. Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique. MRS Online Proceedings Library 591, 188–193 (1999). https://doi.org/10.1557/PROC-591-195

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