Fabrication of Planar Diamond Electron Emitters for Flat Panel Displays

MRS Online Proceedings Library volume 558, pages155–160(1999)Cite this article

Abstract

A planar electron emitter was fabricated employing chemical vapor deposited (CVD) diamond thin films. This device is composed of CVD diamond films selectively deposited on a pair of patterned Au/Cr films separated 2 micrometers from each other. When the driving voltage (Vd) was applied between the Au/Cr films, the extremely low threshold emission from diamond film was observed (Vd ~ 10 V). Furthermore, by applying high voltage on anode screen placed above this device, part of emitted current was drawn to the anode and the luminescence from phosphors was clearly seen under Vd = 50V. The mechanism of electron emission from the diamond films used in this device was also discussed by comparing with the electron emission from isolated diamond particles. It was found that the effective work functions differ between the isolated particles and the continuous films. This result suggests a difference in the emission site of electrons.

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References

  1. 1)

    F. J. Himpsel, J. A. Knapp, J. A. Van Vechten and D. E. Eastman: Phys. Rev. B 20 (1979) 625.

    Google Scholar 

  2. 2)

    M. W. Geis, J. A. Gregory and B. B. Pate: IEEE Trans. Electron Devices 38 (1991) 619.

    CAS  Article  Google Scholar 

  3. 3)

    K. Okano, T. Yamada, H Ishihara, S. Koizumi and J. Itoh: Appl. Phys. Lett. 70 (1997) 2201.

    CAS  Article  Google Scholar 

  4. 4)

    M. W. Geis, J. C. Twichell, N. N. Efremow, K. Krohn and T. M. Lyszczarz: Appl. Phys. Lett. 68 (1996) 2294.

    CAS  Article  Google Scholar 

  5. 5)

    C. Bandis and B. B. Pate: Appl. Phys. Lett. 69 (1996) 366.

    CAS  Article  Google Scholar 

  6. 6)

    Z. H. Huang, P. H. Culter, N. M. Miskovsky and T. E. Sullivan: Appl. Phys. Lett. 65 (1994) 2562.

    CAS  Article  Google Scholar 

  7. 7)

    W. Zhu, G. P. Kochanski, S. Jin and L. Seibles: J. Vac. Sci. Technol. B 14 (1996) 2011.

    CAS  Article  Google Scholar 

  8. 8)

    I. Nomura, K. Sakai, E. Yamaguchi, M. Yamanobe, S. Ikeda, T. Hara, K. Hatanaka, Y. Osada, H. Yamamoto and T. Nakagiri: IDW’96 Tech. Dig. (1996) 523.

    Google Scholar 

  9. 9)

    H. Kawamura, T. Maki and T. Kobayashi: Jpn. J. Appl. Phys. 38 (1999) in published.

  10. 10)

    A. van der Ziel: Solid State Physical Electronics (Prentice-Hall, Englewood Cliffs, 1966).

    Google Scholar 

  11. 11)

    M. W. Geis, J. C. Twichell and T. M. Lyszczarz: J. Vac. Sci. Technol. B 14 (1996) 2060.

    CAS  Article  Google Scholar 

  12. 12)

    M. I. Landstrass and K. V. Lavi: Appl. Phys. Lett. 55 (1989) 975.

    CAS  Article  Google Scholar 

  13. 13)

    T. Maki, S. Shikama, M. Komori, Y. Sakaguchi, K. Sakuta and T. Kobayashi: Jpn. J. Appl. Phys. 31 (1992) 1446.

    Article  Google Scholar 

  14. 14)

    P. K. Baumann and R. J. Nemanich: J. Appl. Phys. 83 (1998) 2072.

    CAS  Article  Google Scholar 

  15. 15)

    D. P. Malta, J. B. Posthill, T. P. Humphreys, R. E. Thomas, G. G. Fountain, R. A. Rudder, G. C. Hudson, M. J. Mantini and R. J. Markunas: Appl. Phys. Lett. 64 (1994) 1929.

    CAS  Article  Google Scholar 

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Affiliations

  1. Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka, 560-8531, Japan

    H. Kawamura, S. Kato, T. Maki & T. Kobayashi

Authors
  1. H. Kawamura
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  2. S. Kato
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  3. T. Maki
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  4. T. Kobayashi
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Correspondence to H. Kawamura.

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Kawamura, H., Kato, S., Maki, T. et al. Fabrication of Planar Diamond Electron Emitters for Flat Panel Displays. MRS Online Proceedings Library 558, 155–160 (1999). https://doi.org/10.1557/PROC-558-155

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