A High-Voltage Hydrogenated Amorphous Silicon Thin-Film Transistor for Reflective Active-Matrix Cholesteric LCD

MRS Online Proceedings Library volume 558, pages125–128(1999)Cite this article

Abstract

A high-voltage hydrogenated amorphous silicon thin film transistor (H-V a-Si:H TFT) with thick double layer gate insulator (~0.95 µm) has been developed for reflective active-matrix cholesteric liquid crystal displays. The double layer gate insulator consists of 0.85 and 0.10 µm thick benzocyclobutene and hydrogenated amorphous silicon nitride, respectively. This HV a-Si:H TFT operates at the gate-tosource and drain-to-source biases up to 100V without any serious leakage current degradation and device breakdown.

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

US$ 39.95

Tax calculation will be finalised during checkout.

References

  1. 1.

    J.Y. Nahm, et al. in Dig. Asia Display ’98, pp.949-952.

  2. 2.

    H. Steemers, M. Hack, R. Weisfield, H. Tuan, and M. Thompson, Philosophical Magazine B. 63, 337–348 (1991)

    CAS  Article  Google Scholar 

  3. 3.

    R. A. Martin, V. D. Costa, M. Hack, and J. G. Shaw, IEEE Trans. on Electron Devices 40, 634–644 (1993)

    CAS  Article  Google Scholar 

  4. 4.

    S. Kishida, Y. Naruke, Y. Uchida, and M. Matsumura, Jpn. J. Appl. Phys. 22, 511–517 (1983)

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

  1. Center for Integrated Microsystems Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan, 48105, USA

    J. Y. Nahm, J. H. Lan & J. Kanicki

Authors
  1. J. Y. Nahm
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. H. Lan
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. J. Kanicki
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Nahm, J.Y., Lan, J.H. & Kanicki, J. A High-Voltage Hydrogenated Amorphous Silicon Thin-Film Transistor for Reflective Active-Matrix Cholesteric LCD. MRS Online Proceedings Library 558, 125–128 (1999). https://doi.org/10.1557/PROC-558-125

Download citation